10/31/2012	9:43:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2012	9:43:50 AM	Recipe started at 9:43 AM
10/31/2012	9:43:50 AM	Helium valve closed
10/31/2012	9:43:50 AM	H2 valve closed
10/31/2012	9:43:50 AM	BCl3 valve closed
10/31/2012	9:43:50 AM	PH3 valve closed
10/31/2012	9:43:50 AM	SiCl4 pre valve closed
10/31/2012	9:43:50 AM	SiCl4 post valve closed
10/31/2012	9:43:50 AM	Main Vac valve closed
10/31/2012	9:43:50 AM	Bypass valve closed
10/31/2012	9:43:50 AM	Bubbler valve closed
10/31/2012	9:43:50 AM	Helium MFC set to  0.000000
10/31/2012	9:43:50 AM	H2 MFC set to  0.000000
10/31/2012	9:43:50 AM	BCl3 MFC set to  0.000000
10/31/2012	9:43:50 AM	PH3 MFC set to  0.000000
10/31/2012	9:43:50 AM	SiCl4 MFC set to  0.000000
10/31/2012	9:43:50 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	9:43:50 AM	Tube furnace set to 0
10/31/2012	9:43:53 AM	H2 valve closed
10/31/2012	9:43:53 AM	BCl3 valve closed
10/31/2012	9:43:53 AM	PH3 valve closed
10/31/2012	9:43:53 AM	SiCl4 pre valve closed
10/31/2012	9:43:53 AM	SiCl4 post valve closed
10/31/2012	9:43:53 AM	Main Vac valve closed
10/31/2012	9:43:53 AM	Bypass valve closed
10/31/2012	9:43:53 AM	Bubbler valve closed
10/31/2012	9:43:53 AM	Helium valve opened
10/31/2012	9:43:53 AM	Helium MFC set to  500.000000
10/31/2012	9:43:54 AM	H2 MFC set to  0.000000
10/31/2012	9:43:54 AM	BCl3 MFC set to  0.000000
10/31/2012	9:43:54 AM	PH3 MFC set to  0.000000
10/31/2012	9:43:54 AM	SiCl4 MFC set to  0.000000
10/31/2012	9:43:54 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	9:43:54 AM	Tube furnace set to 0
10/31/2012	9:45:07 AM	Helium valve closed
10/31/2012	9:45:07 AM	H2 valve closed
10/31/2012	9:45:07 AM	BCl3 valve closed
10/31/2012	9:45:07 AM	PH3 valve closed
10/31/2012	9:45:07 AM	SiCl4 pre valve closed
10/31/2012	9:45:07 AM	SiCl4 post valve closed
10/31/2012	9:45:07 AM	Main Vac valve closed
10/31/2012	9:45:07 AM	Bypass valve closed
10/31/2012	9:45:07 AM	Bubbler valve closed
10/31/2012	9:45:07 AM	Helium MFC set to  0.000000
10/31/2012	9:45:07 AM	H2 MFC set to  0.000000
10/31/2012	9:45:07 AM	BCl3 MFC set to  0.000000
10/31/2012	9:45:07 AM	PH3 MFC set to  0.000000
10/31/2012	9:45:08 AM	SiCl4 MFC set to  0.000000
10/31/2012	9:45:08 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	9:45:08 AM	Tube furnace set to 0
10/31/2012	9:45:09 AM	Run finished at 9:45 AM
10/31/2012	9:45:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2012	9:48:56 AM	Tube furnace set to 200
10/31/2012	9:48:57 AM	Bypass valve opened
10/31/2012	9:53:01 AM	Bypass valve closed
10/31/2012	9:53:02 AM	Main Vac valve opened
10/31/2012	9:55:58 AM	Recipe started at 9:55 AM
10/31/2012	9:55:58 AM	Helium valve closed
10/31/2012	9:55:58 AM	H2 valve closed
10/31/2012	9:55:58 AM	BCl3 valve closed
10/31/2012	9:55:58 AM	PH3 valve closed
10/31/2012	9:55:58 AM	SiCl4 pre valve closed
10/31/2012	9:55:58 AM	SiCl4 post valve closed
10/31/2012	9:55:58 AM	Bypass valve closed
10/31/2012	9:55:58 AM	Bubbler valve closed
10/31/2012	9:55:58 AM	Main Vac valve opened
10/31/2012	9:55:58 AM	Helium MFC set to  0.000000
10/31/2012	9:55:58 AM	H2 MFC set to  0.000000
10/31/2012	9:55:58 AM	BCl3 MFC set to  0.000000
10/31/2012	9:55:58 AM	PH3 MFC set to  0.000000
10/31/2012	9:55:58 AM	SiCl4 MFC set to  0.000000
10/31/2012	9:55:58 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	9:55:58 AM	Tube furnace set to 0
10/31/2012	9:56:28 AM	H2 valve closed
10/31/2012	9:56:28 AM	BCl3 valve closed
10/31/2012	9:56:29 AM	PH3 valve closed
10/31/2012	9:56:29 AM	SiCl4 pre valve closed
10/31/2012	9:56:29 AM	SiCl4 post valve closed
10/31/2012	9:56:29 AM	Bypass valve closed
10/31/2012	9:56:29 AM	Bubbler valve closed
10/31/2012	9:56:29 AM	Helium valve opened
10/31/2012	9:56:29 AM	Main Vac valve opened
10/31/2012	9:56:29 AM	Helium MFC set to  20.000000
10/31/2012	9:56:29 AM	H2 MFC set to  0.000000
10/31/2012	9:56:29 AM	BCl3 MFC set to  0.000000
10/31/2012	9:56:29 AM	PH3 MFC set to  0.000000
10/31/2012	9:56:29 AM	SiCl4 MFC set to  0.000000
10/31/2012	9:56:29 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	9:56:29 AM	Tube furnace set to 0
10/31/2012	9:56:59 AM	Helium valve closed
10/31/2012	9:56:59 AM	H2 valve closed
10/31/2012	9:56:59 AM	BCl3 valve closed
10/31/2012	9:56:59 AM	PH3 valve closed
10/31/2012	9:56:59 AM	SiCl4 pre valve closed
10/31/2012	9:56:59 AM	SiCl4 post valve closed
10/31/2012	9:56:59 AM	Bypass valve closed
10/31/2012	9:56:59 AM	Bubbler valve closed
10/31/2012	9:56:59 AM	Main Vac valve opened
10/31/2012	9:56:59 AM	Helium MFC set to  0.000000
10/31/2012	9:56:59 AM	H2 MFC set to  0.000000
10/31/2012	9:56:59 AM	BCl3 MFC set to  0.000000
10/31/2012	9:56:59 AM	PH3 MFC set to  0.000000
10/31/2012	9:56:59 AM	SiCl4 MFC set to  0.000000
10/31/2012	9:56:59 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	9:56:59 AM	Tube furnace set to 0
10/31/2012	9:57:29 AM	H2 valve closed
10/31/2012	9:57:29 AM	BCl3 valve closed
10/31/2012	9:57:29 AM	PH3 valve closed
10/31/2012	9:57:29 AM	SiCl4 pre valve closed
10/31/2012	9:57:29 AM	SiCl4 post valve closed
10/31/2012	9:57:29 AM	Bypass valve closed
10/31/2012	9:57:29 AM	Bubbler valve closed
10/31/2012	9:57:29 AM	Helium valve opened
10/31/2012	9:57:29 AM	Main Vac valve opened
10/31/2012	9:57:29 AM	Helium MFC set to  20.000000
10/31/2012	9:57:29 AM	H2 MFC set to  0.000000
10/31/2012	9:57:29 AM	BCl3 MFC set to  0.000000
10/31/2012	9:57:29 AM	PH3 MFC set to  0.000000
10/31/2012	9:57:29 AM	SiCl4 MFC set to  0.000000
10/31/2012	9:57:29 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	9:57:29 AM	Tube furnace set to 0
10/31/2012	9:57:59 AM	Helium valve closed
10/31/2012	9:57:59 AM	H2 valve closed
10/31/2012	9:57:59 AM	BCl3 valve closed
10/31/2012	9:57:59 AM	PH3 valve closed
10/31/2012	9:57:59 AM	SiCl4 pre valve closed
10/31/2012	9:57:59 AM	SiCl4 post valve closed
10/31/2012	9:57:59 AM	Bypass valve closed
10/31/2012	9:57:59 AM	Bubbler valve closed
10/31/2012	9:57:59 AM	Main Vac valve opened
10/31/2012	9:57:59 AM	Helium MFC set to  0.000000
10/31/2012	9:57:59 AM	H2 MFC set to  0.000000
10/31/2012	9:57:59 AM	BCl3 MFC set to  0.000000
10/31/2012	9:57:59 AM	PH3 MFC set to  0.000000
10/31/2012	9:57:59 AM	SiCl4 MFC set to  0.000000
10/31/2012	9:57:59 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	9:57:59 AM	Tube furnace set to 0
10/31/2012	9:58:29 AM	H2 valve closed
10/31/2012	9:58:29 AM	BCl3 valve closed
10/31/2012	9:58:29 AM	PH3 valve closed
10/31/2012	9:58:29 AM	SiCl4 pre valve closed
10/31/2012	9:58:29 AM	SiCl4 post valve closed
10/31/2012	9:58:29 AM	Bypass valve closed
10/31/2012	9:58:29 AM	Bubbler valve closed
10/31/2012	9:58:29 AM	Helium valve opened
10/31/2012	9:58:29 AM	Main Vac valve opened
10/31/2012	9:58:29 AM	Helium MFC set to  20.000000
10/31/2012	9:58:30 AM	H2 MFC set to  0.000000
10/31/2012	9:58:30 AM	BCl3 MFC set to  0.000000
10/31/2012	9:58:30 AM	PH3 MFC set to  0.000000
10/31/2012	9:58:30 AM	SiCl4 MFC set to  0.000000
10/31/2012	9:58:30 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	9:58:30 AM	Tube furnace set to 0
10/31/2012	9:59:00 AM	Helium valve closed
10/31/2012	9:59:00 AM	H2 valve closed
10/31/2012	9:59:00 AM	BCl3 valve closed
10/31/2012	9:59:00 AM	PH3 valve closed
10/31/2012	9:59:00 AM	SiCl4 pre valve closed
10/31/2012	9:59:00 AM	SiCl4 post valve closed
10/31/2012	9:59:00 AM	Bypass valve closed
10/31/2012	9:59:00 AM	Bubbler valve closed
10/31/2012	9:59:00 AM	Main Vac valve opened
10/31/2012	9:59:00 AM	Helium MFC set to  0.000000
10/31/2012	9:59:00 AM	H2 MFC set to  0.000000
10/31/2012	9:59:00 AM	BCl3 MFC set to  0.000000
10/31/2012	9:59:00 AM	PH3 MFC set to  0.000000
10/31/2012	9:59:00 AM	SiCl4 MFC set to  0.000000
10/31/2012	9:59:00 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	9:59:00 AM	Tube furnace set to 0
10/31/2012	9:59:30 AM	H2 valve closed
10/31/2012	9:59:30 AM	BCl3 valve closed
10/31/2012	9:59:30 AM	PH3 valve closed
10/31/2012	9:59:30 AM	SiCl4 pre valve closed
10/31/2012	9:59:30 AM	SiCl4 post valve closed
10/31/2012	9:59:30 AM	Bypass valve closed
10/31/2012	9:59:30 AM	Bubbler valve closed
10/31/2012	9:59:30 AM	Helium valve opened
10/31/2012	9:59:30 AM	Main Vac valve opened
10/31/2012	9:59:30 AM	Helium MFC set to  20.000000
10/31/2012	9:59:30 AM	H2 MFC set to  0.000000
10/31/2012	9:59:30 AM	BCl3 MFC set to  0.000000
10/31/2012	9:59:30 AM	PH3 MFC set to  0.000000
10/31/2012	9:59:30 AM	SiCl4 MFC set to  0.000000
10/31/2012	9:59:30 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	9:59:30 AM	Tube furnace set to 0
10/31/2012	10:00:00 AM	Helium valve closed
10/31/2012	10:00:00 AM	H2 valve closed
10/31/2012	10:00:00 AM	BCl3 valve closed
10/31/2012	10:00:00 AM	PH3 valve closed
10/31/2012	10:00:00 AM	SiCl4 pre valve closed
10/31/2012	10:00:00 AM	SiCl4 post valve closed
10/31/2012	10:00:00 AM	Bypass valve closed
10/31/2012	10:00:00 AM	Bubbler valve closed
10/31/2012	10:00:00 AM	Main Vac valve opened
10/31/2012	10:00:00 AM	Helium MFC set to  0.000000
10/31/2012	10:00:00 AM	H2 MFC set to  0.000000
10/31/2012	10:00:00 AM	BCl3 MFC set to  0.000000
10/31/2012	10:00:00 AM	PH3 MFC set to  0.000000
10/31/2012	10:00:00 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:00:00 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:00:00 AM	Tube furnace set to 0
10/31/2012	10:00:30 AM	H2 valve closed
10/31/2012	10:00:30 AM	BCl3 valve closed
10/31/2012	10:00:30 AM	PH3 valve closed
10/31/2012	10:00:30 AM	SiCl4 pre valve closed
10/31/2012	10:00:30 AM	SiCl4 post valve closed
10/31/2012	10:00:30 AM	Bypass valve closed
10/31/2012	10:00:30 AM	Bubbler valve closed
10/31/2012	10:00:30 AM	Helium valve opened
10/31/2012	10:00:30 AM	Main Vac valve opened
10/31/2012	10:00:30 AM	Helium MFC set to  20.000000
10/31/2012	10:00:30 AM	H2 MFC set to  0.000000
10/31/2012	10:00:30 AM	BCl3 MFC set to  0.000000
10/31/2012	10:00:30 AM	PH3 MFC set to  0.000000
10/31/2012	10:00:31 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:00:31 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:00:31 AM	Tube furnace set to 0
10/31/2012	10:01:01 AM	Helium valve closed
10/31/2012	10:01:01 AM	H2 valve closed
10/31/2012	10:01:01 AM	BCl3 valve closed
10/31/2012	10:01:01 AM	PH3 valve closed
10/31/2012	10:01:01 AM	SiCl4 pre valve closed
10/31/2012	10:01:01 AM	SiCl4 post valve closed
10/31/2012	10:01:01 AM	Bypass valve closed
10/31/2012	10:01:01 AM	Bubbler valve closed
10/31/2012	10:01:01 AM	Main Vac valve opened
10/31/2012	10:01:01 AM	Helium MFC set to  0.000000
10/31/2012	10:01:01 AM	H2 MFC set to  0.000000
10/31/2012	10:01:01 AM	BCl3 MFC set to  0.000000
10/31/2012	10:01:01 AM	PH3 MFC set to  0.000000
10/31/2012	10:01:01 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:01:01 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:01:01 AM	Tube furnace set to 0
10/31/2012	10:01:31 AM	H2 valve closed
10/31/2012	10:01:31 AM	BCl3 valve closed
10/31/2012	10:01:31 AM	PH3 valve closed
10/31/2012	10:01:31 AM	SiCl4 pre valve closed
10/31/2012	10:01:31 AM	SiCl4 post valve closed
10/31/2012	10:01:31 AM	Bypass valve closed
10/31/2012	10:01:31 AM	Bubbler valve closed
10/31/2012	10:01:31 AM	Helium valve opened
10/31/2012	10:01:31 AM	Main Vac valve opened
10/31/2012	10:01:31 AM	Helium MFC set to  20.000000
10/31/2012	10:01:31 AM	H2 MFC set to  0.000000
10/31/2012	10:01:31 AM	BCl3 MFC set to  0.000000
10/31/2012	10:01:31 AM	PH3 MFC set to  0.000000
10/31/2012	10:01:31 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:01:31 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:01:31 AM	Tube furnace set to 0
10/31/2012	10:02:01 AM	Helium valve closed
10/31/2012	10:02:01 AM	H2 valve closed
10/31/2012	10:02:01 AM	BCl3 valve closed
10/31/2012	10:02:01 AM	PH3 valve closed
10/31/2012	10:02:01 AM	SiCl4 pre valve closed
10/31/2012	10:02:01 AM	SiCl4 post valve closed
10/31/2012	10:02:01 AM	Bypass valve closed
10/31/2012	10:02:01 AM	Bubbler valve closed
10/31/2012	10:02:01 AM	Main Vac valve opened
10/31/2012	10:02:01 AM	Helium MFC set to  0.000000
10/31/2012	10:02:01 AM	H2 MFC set to  0.000000
10/31/2012	10:02:01 AM	BCl3 MFC set to  0.000000
10/31/2012	10:02:01 AM	PH3 MFC set to  0.000000
10/31/2012	10:02:01 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:02:01 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:02:01 AM	Tube furnace set to 0
10/31/2012	10:02:31 AM	H2 valve closed
10/31/2012	10:02:31 AM	BCl3 valve closed
10/31/2012	10:02:31 AM	PH3 valve closed
10/31/2012	10:02:31 AM	SiCl4 pre valve closed
10/31/2012	10:02:31 AM	SiCl4 post valve closed
10/31/2012	10:02:31 AM	Bypass valve closed
10/31/2012	10:02:31 AM	Bubbler valve closed
10/31/2012	10:02:31 AM	Helium valve opened
10/31/2012	10:02:31 AM	Main Vac valve opened
10/31/2012	10:02:31 AM	Helium MFC set to  20.000000
10/31/2012	10:02:31 AM	H2 MFC set to  0.000000
10/31/2012	10:02:31 AM	BCl3 MFC set to  0.000000
10/31/2012	10:02:31 AM	PH3 MFC set to  0.000000
10/31/2012	10:02:31 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:02:32 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:02:32 AM	Tube furnace set to 0
10/31/2012	10:03:02 AM	Helium valve closed
10/31/2012	10:03:02 AM	H2 valve closed
10/31/2012	10:03:02 AM	BCl3 valve closed
10/31/2012	10:03:02 AM	PH3 valve closed
10/31/2012	10:03:02 AM	SiCl4 pre valve closed
10/31/2012	10:03:02 AM	SiCl4 post valve closed
10/31/2012	10:03:02 AM	Bypass valve closed
10/31/2012	10:03:02 AM	Bubbler valve closed
10/31/2012	10:03:02 AM	Main Vac valve opened
10/31/2012	10:03:02 AM	Helium MFC set to  0.000000
10/31/2012	10:03:02 AM	H2 MFC set to  0.000000
10/31/2012	10:03:02 AM	BCl3 MFC set to  0.000000
10/31/2012	10:03:02 AM	PH3 MFC set to  0.000000
10/31/2012	10:03:02 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:03:02 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:03:02 AM	Tube furnace set to 0
10/31/2012	10:03:32 AM	H2 valve closed
10/31/2012	10:03:32 AM	BCl3 valve closed
10/31/2012	10:03:32 AM	PH3 valve closed
10/31/2012	10:03:32 AM	SiCl4 pre valve closed
10/31/2012	10:03:32 AM	SiCl4 post valve closed
10/31/2012	10:03:32 AM	Bypass valve closed
10/31/2012	10:03:32 AM	Bubbler valve closed
10/31/2012	10:03:32 AM	Helium valve opened
10/31/2012	10:03:32 AM	Main Vac valve opened
10/31/2012	10:03:32 AM	Helium MFC set to  20.000000
10/31/2012	10:03:32 AM	H2 MFC set to  0.000000
10/31/2012	10:03:32 AM	BCl3 MFC set to  0.000000
10/31/2012	10:03:32 AM	PH3 MFC set to  0.000000
10/31/2012	10:03:32 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:03:32 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:03:32 AM	Tube furnace set to 0
10/31/2012	10:04:02 AM	Helium valve closed
10/31/2012	10:04:02 AM	H2 valve closed
10/31/2012	10:04:02 AM	BCl3 valve closed
10/31/2012	10:04:02 AM	PH3 valve closed
10/31/2012	10:04:02 AM	SiCl4 pre valve closed
10/31/2012	10:04:02 AM	SiCl4 post valve closed
10/31/2012	10:04:02 AM	Bypass valve closed
10/31/2012	10:04:02 AM	Bubbler valve closed
10/31/2012	10:04:02 AM	Main Vac valve opened
10/31/2012	10:04:02 AM	Helium MFC set to  0.000000
10/31/2012	10:04:02 AM	H2 MFC set to  0.000000
10/31/2012	10:04:02 AM	BCl3 MFC set to  0.000000
10/31/2012	10:04:02 AM	PH3 MFC set to  0.000000
10/31/2012	10:04:02 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:04:02 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:04:02 AM	Tube furnace set to 0
10/31/2012	10:04:32 AM	H2 valve closed
10/31/2012	10:04:32 AM	BCl3 valve closed
10/31/2012	10:04:32 AM	PH3 valve closed
10/31/2012	10:04:32 AM	SiCl4 pre valve closed
10/31/2012	10:04:32 AM	SiCl4 post valve closed
10/31/2012	10:04:32 AM	Bypass valve closed
10/31/2012	10:04:32 AM	Bubbler valve closed
10/31/2012	10:04:32 AM	Helium valve opened
10/31/2012	10:04:32 AM	Main Vac valve opened
10/31/2012	10:04:32 AM	Helium MFC set to  20.000000
10/31/2012	10:04:32 AM	H2 MFC set to  0.000000
10/31/2012	10:04:32 AM	BCl3 MFC set to  0.000000
10/31/2012	10:04:32 AM	PH3 MFC set to  0.000000
10/31/2012	10:04:32 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:04:32 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:04:33 AM	Tube furnace set to 0
10/31/2012	10:05:03 AM	Helium valve closed
10/31/2012	10:05:03 AM	H2 valve closed
10/31/2012	10:05:03 AM	BCl3 valve closed
10/31/2012	10:05:03 AM	PH3 valve closed
10/31/2012	10:05:03 AM	SiCl4 pre valve closed
10/31/2012	10:05:03 AM	SiCl4 post valve closed
10/31/2012	10:05:03 AM	Bypass valve closed
10/31/2012	10:05:03 AM	Bubbler valve closed
10/31/2012	10:05:03 AM	Main Vac valve opened
10/31/2012	10:05:03 AM	Helium MFC set to  0.000000
10/31/2012	10:05:03 AM	H2 MFC set to  0.000000
10/31/2012	10:05:03 AM	BCl3 MFC set to  0.000000
10/31/2012	10:05:03 AM	PH3 MFC set to  0.000000
10/31/2012	10:05:03 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:05:03 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:05:03 AM	Tube furnace set to 200
10/31/2012	10:05:33 AM	H2 valve closed
10/31/2012	10:05:33 AM	BCl3 valve closed
10/31/2012	10:05:33 AM	PH3 valve closed
10/31/2012	10:05:33 AM	SiCl4 pre valve closed
10/31/2012	10:05:33 AM	SiCl4 post valve closed
10/31/2012	10:05:33 AM	Bypass valve closed
10/31/2012	10:05:33 AM	Bubbler valve closed
10/31/2012	10:05:33 AM	Helium valve opened
10/31/2012	10:05:33 AM	Main Vac valve opened
10/31/2012	10:05:33 AM	Helium MFC set to  20.000000
10/31/2012	10:05:33 AM	H2 MFC set to  0.000000
10/31/2012	10:05:33 AM	BCl3 MFC set to  0.000000
10/31/2012	10:05:33 AM	PH3 MFC set to  0.000000
10/31/2012	10:05:33 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:05:33 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:05:33 AM	Tube furnace set to 200
10/31/2012	10:06:03 AM	Helium valve closed
10/31/2012	10:06:03 AM	H2 valve closed
10/31/2012	10:06:03 AM	BCl3 valve closed
10/31/2012	10:06:03 AM	PH3 valve closed
10/31/2012	10:06:03 AM	SiCl4 pre valve closed
10/31/2012	10:06:03 AM	SiCl4 post valve closed
10/31/2012	10:06:03 AM	Bypass valve closed
10/31/2012	10:06:03 AM	Bubbler valve closed
10/31/2012	10:06:03 AM	Main Vac valve opened
10/31/2012	10:06:03 AM	Helium MFC set to  0.000000
10/31/2012	10:06:03 AM	H2 MFC set to  0.000000
10/31/2012	10:06:03 AM	BCl3 MFC set to  0.000000
10/31/2012	10:06:03 AM	PH3 MFC set to  0.000000
10/31/2012	10:06:03 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:06:03 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:06:03 AM	Tube furnace set to 200
10/31/2012	10:06:33 AM	H2 valve closed
10/31/2012	10:06:33 AM	BCl3 valve closed
10/31/2012	10:06:33 AM	PH3 valve closed
10/31/2012	10:06:33 AM	SiCl4 pre valve closed
10/31/2012	10:06:33 AM	SiCl4 post valve closed
10/31/2012	10:06:33 AM	Bypass valve closed
10/31/2012	10:06:33 AM	Bubbler valve closed
10/31/2012	10:06:33 AM	Helium valve opened
10/31/2012	10:06:33 AM	Main Vac valve opened
10/31/2012	10:06:33 AM	Helium MFC set to  20.000000
10/31/2012	10:06:33 AM	H2 MFC set to  0.000000
10/31/2012	10:06:33 AM	BCl3 MFC set to  0.000000
10/31/2012	10:06:33 AM	PH3 MFC set to  0.000000
10/31/2012	10:06:33 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:06:33 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:06:34 AM	Tube furnace set to 200
10/31/2012	10:07:04 AM	Helium valve closed
10/31/2012	10:07:04 AM	H2 valve closed
10/31/2012	10:07:04 AM	BCl3 valve closed
10/31/2012	10:07:04 AM	PH3 valve closed
10/31/2012	10:07:04 AM	SiCl4 pre valve closed
10/31/2012	10:07:04 AM	SiCl4 post valve closed
10/31/2012	10:07:04 AM	Bypass valve closed
10/31/2012	10:07:04 AM	Bubbler valve closed
10/31/2012	10:07:04 AM	Main Vac valve opened
10/31/2012	10:07:04 AM	Helium MFC set to  0.000000
10/31/2012	10:07:04 AM	H2 MFC set to  0.000000
10/31/2012	10:07:04 AM	BCl3 MFC set to  0.000000
10/31/2012	10:07:04 AM	PH3 MFC set to  0.000000
10/31/2012	10:07:04 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:07:04 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:07:04 AM	Tube furnace set to 200
10/31/2012	10:07:34 AM	H2 valve closed
10/31/2012	10:07:34 AM	BCl3 valve closed
10/31/2012	10:07:34 AM	PH3 valve closed
10/31/2012	10:07:34 AM	SiCl4 pre valve closed
10/31/2012	10:07:34 AM	SiCl4 post valve closed
10/31/2012	10:07:34 AM	Bypass valve closed
10/31/2012	10:07:34 AM	Bubbler valve closed
10/31/2012	10:07:34 AM	Helium valve opened
10/31/2012	10:07:34 AM	Main Vac valve opened
10/31/2012	10:07:34 AM	Helium MFC set to  20.000000
10/31/2012	10:07:34 AM	H2 MFC set to  0.000000
10/31/2012	10:07:34 AM	BCl3 MFC set to  0.000000
10/31/2012	10:07:34 AM	PH3 MFC set to  0.000000
10/31/2012	10:07:34 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:07:34 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:07:34 AM	Tube furnace set to 200
10/31/2012	10:08:04 AM	Helium valve closed
10/31/2012	10:08:04 AM	H2 valve closed
10/31/2012	10:08:04 AM	BCl3 valve closed
10/31/2012	10:08:04 AM	PH3 valve closed
10/31/2012	10:08:04 AM	SiCl4 pre valve closed
10/31/2012	10:08:04 AM	SiCl4 post valve closed
10/31/2012	10:08:04 AM	Bypass valve closed
10/31/2012	10:08:04 AM	Bubbler valve closed
10/31/2012	10:08:04 AM	Main Vac valve opened
10/31/2012	10:08:04 AM	Helium MFC set to  0.000000
10/31/2012	10:08:04 AM	H2 MFC set to  0.000000
10/31/2012	10:08:04 AM	BCl3 MFC set to  0.000000
10/31/2012	10:08:04 AM	PH3 MFC set to  0.000000
10/31/2012	10:08:04 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:08:04 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:08:04 AM	Tube furnace set to 200
10/31/2012	10:08:34 AM	H2 valve closed
10/31/2012	10:08:34 AM	BCl3 valve closed
10/31/2012	10:08:34 AM	PH3 valve closed
10/31/2012	10:08:34 AM	SiCl4 pre valve closed
10/31/2012	10:08:34 AM	SiCl4 post valve closed
10/31/2012	10:08:34 AM	Bypass valve closed
10/31/2012	10:08:34 AM	Bubbler valve closed
10/31/2012	10:08:34 AM	Helium valve opened
10/31/2012	10:08:34 AM	Main Vac valve opened
10/31/2012	10:08:34 AM	Helium MFC set to  20.000000
10/31/2012	10:08:34 AM	H2 MFC set to  0.000000
10/31/2012	10:08:34 AM	BCl3 MFC set to  0.000000
10/31/2012	10:08:34 AM	PH3 MFC set to  0.000000
10/31/2012	10:08:34 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:08:34 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:08:35 AM	Tube furnace set to 200
10/31/2012	10:09:05 AM	Helium valve closed
10/31/2012	10:09:05 AM	H2 valve closed
10/31/2012	10:09:05 AM	BCl3 valve closed
10/31/2012	10:09:05 AM	PH3 valve closed
10/31/2012	10:09:05 AM	SiCl4 pre valve closed
10/31/2012	10:09:05 AM	SiCl4 post valve closed
10/31/2012	10:09:05 AM	Bypass valve closed
10/31/2012	10:09:05 AM	Bubbler valve closed
10/31/2012	10:09:05 AM	Main Vac valve opened
10/31/2012	10:09:05 AM	Helium MFC set to  0.000000
10/31/2012	10:09:05 AM	H2 MFC set to  0.000000
10/31/2012	10:09:05 AM	BCl3 MFC set to  0.000000
10/31/2012	10:09:05 AM	PH3 MFC set to  0.000000
10/31/2012	10:09:05 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:09:05 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:09:05 AM	Tube furnace set to 200
10/31/2012	10:09:35 AM	H2 valve closed
10/31/2012	10:09:35 AM	BCl3 valve closed
10/31/2012	10:09:35 AM	PH3 valve closed
10/31/2012	10:09:35 AM	SiCl4 pre valve closed
10/31/2012	10:09:35 AM	SiCl4 post valve closed
10/31/2012	10:09:35 AM	Bypass valve closed
10/31/2012	10:09:35 AM	Bubbler valve closed
10/31/2012	10:09:35 AM	Helium valve opened
10/31/2012	10:09:35 AM	Main Vac valve opened
10/31/2012	10:09:35 AM	Helium MFC set to  20.000000
10/31/2012	10:09:35 AM	H2 MFC set to  0.000000
10/31/2012	10:09:35 AM	BCl3 MFC set to  0.000000
10/31/2012	10:09:35 AM	PH3 MFC set to  0.000000
10/31/2012	10:09:35 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:09:35 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:09:35 AM	Tube furnace set to 200
10/31/2012	10:10:05 AM	Helium valve closed
10/31/2012	10:10:05 AM	H2 valve closed
10/31/2012	10:10:05 AM	BCl3 valve closed
10/31/2012	10:10:05 AM	PH3 valve closed
10/31/2012	10:10:05 AM	SiCl4 pre valve closed
10/31/2012	10:10:05 AM	SiCl4 post valve closed
10/31/2012	10:10:05 AM	Bypass valve closed
10/31/2012	10:10:05 AM	Bubbler valve closed
10/31/2012	10:10:05 AM	Main Vac valve opened
10/31/2012	10:10:05 AM	Helium MFC set to  0.000000
10/31/2012	10:10:05 AM	H2 MFC set to  0.000000
10/31/2012	10:10:05 AM	BCl3 MFC set to  0.000000
10/31/2012	10:10:05 AM	PH3 MFC set to  0.000000
10/31/2012	10:10:05 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:10:05 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:10:05 AM	Tube furnace set to 200
10/31/2012	10:10:35 AM	H2 valve closed
10/31/2012	10:10:35 AM	BCl3 valve closed
10/31/2012	10:10:35 AM	PH3 valve closed
10/31/2012	10:10:35 AM	SiCl4 pre valve closed
10/31/2012	10:10:35 AM	SiCl4 post valve closed
10/31/2012	10:10:35 AM	Bypass valve closed
10/31/2012	10:10:35 AM	Bubbler valve closed
10/31/2012	10:10:35 AM	Helium valve opened
10/31/2012	10:10:35 AM	Main Vac valve opened
10/31/2012	10:10:35 AM	Helium MFC set to  20.000000
10/31/2012	10:10:35 AM	H2 MFC set to  0.000000
10/31/2012	10:10:35 AM	BCl3 MFC set to  0.000000
10/31/2012	10:10:35 AM	PH3 MFC set to  0.000000
10/31/2012	10:10:35 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:10:35 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:10:36 AM	Tube furnace set to 200
10/31/2012	10:11:06 AM	Helium valve closed
10/31/2012	10:11:06 AM	H2 valve closed
10/31/2012	10:11:06 AM	BCl3 valve closed
10/31/2012	10:11:06 AM	PH3 valve closed
10/31/2012	10:11:06 AM	SiCl4 pre valve closed
10/31/2012	10:11:06 AM	SiCl4 post valve closed
10/31/2012	10:11:06 AM	Bypass valve closed
10/31/2012	10:11:06 AM	Bubbler valve closed
10/31/2012	10:11:06 AM	Main Vac valve opened
10/31/2012	10:11:06 AM	Helium MFC set to  0.000000
10/31/2012	10:11:06 AM	H2 MFC set to  0.000000
10/31/2012	10:11:06 AM	BCl3 MFC set to  0.000000
10/31/2012	10:11:06 AM	PH3 MFC set to  0.000000
10/31/2012	10:11:06 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:11:06 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:11:06 AM	Tube furnace set to 0
10/31/2012	10:11:07 AM	Run finished at 10:11 AM
10/31/2012	10:30:33 AM	Helium MFC set to  10.000000
10/31/2012	10:30:34 AM	Helium valve opened
10/31/2012	10:30:45 AM	Helium valve closed
10/31/2012	10:30:48 AM	Helium MFC set to  0.000000
10/31/2012	10:35:01 AM	Helium valve closed
10/31/2012	10:35:01 AM	H2 valve closed
10/31/2012	10:35:01 AM	BCl3 valve closed
10/31/2012	10:35:01 AM	PH3 valve closed
10/31/2012	10:35:01 AM	SiCl4 pre valve closed
10/31/2012	10:35:01 AM	SiCl4 post valve closed
10/31/2012	10:35:01 AM	Main Vac valve closed
10/31/2012	10:35:01 AM	Bypass valve closed
10/31/2012	10:35:01 AM	Bubbler valve closed
10/31/2012	10:35:01 AM	Helium MFC set to  0.000000
10/31/2012	10:35:01 AM	H2 MFC set to  0.000000
10/31/2012	10:35:01 AM	BCl3 MFC set to  0.000000
10/31/2012	10:35:01 AM	PH3 MFC set to  0.000000
10/31/2012	10:35:01 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:35:02 AM	Bypass solenoid MFC set to  760.000000
10/31/2012	10:35:02 AM	Tube furnace set to 0
10/31/2012	10:35:04 AM	Main Vac valve opened
10/31/2012	10:35:10 AM	Main Vac valve closed
10/31/2012	10:35:20 AM	Main Vac valve opened
10/31/2012	10:39:06 AM	Recipe started at 10:39 AM
10/31/2012	10:39:06 AM	Helium valve closed
10/31/2012	10:39:06 AM	H2 valve closed
10/31/2012	10:39:06 AM	BCl3 valve closed
10/31/2012	10:39:06 AM	PH3 valve closed
10/31/2012	10:39:06 AM	SiCl4 pre valve closed
10/31/2012	10:39:06 AM	SiCl4 post valve closed
10/31/2012	10:39:06 AM	Main Vac valve closed
10/31/2012	10:39:06 AM	Bypass valve closed
10/31/2012	10:39:06 AM	Bubbler valve closed
10/31/2012	10:39:06 AM	Helium MFC set to  0.000000
10/31/2012	10:39:06 AM	H2 MFC set to  0.000000
10/31/2012	10:39:06 AM	BCl3 MFC set to  0.000000
10/31/2012	10:39:06 AM	PH3 MFC set to  0.000000
10/31/2012	10:39:06 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:39:06 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:39:06 AM	Tube furnace set to 0
10/31/2012	10:39:09 AM	Helium valve closed
10/31/2012	10:39:09 AM	BCl3 valve closed
10/31/2012	10:39:09 AM	PH3 valve closed
10/31/2012	10:39:09 AM	SiCl4 pre valve closed
10/31/2012	10:39:09 AM	SiCl4 post valve closed
10/31/2012	10:39:09 AM	Main Vac valve closed
10/31/2012	10:39:09 AM	Bypass valve closed
10/31/2012	10:39:09 AM	Bubbler valve closed
10/31/2012	10:39:09 AM	H2 valve opened
10/31/2012	10:39:09 AM	Helium MFC set to  0.000000
10/31/2012	10:39:09 AM	H2 MFC set to  500.000000
10/31/2012	10:39:09 AM	BCl3 MFC set to  0.000000
10/31/2012	10:39:09 AM	PH3 MFC set to  0.000000
10/31/2012	10:39:09 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:39:09 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:39:09 AM	Tube furnace set to 0
10/31/2012	10:40:23 AM	Helium valve closed
10/31/2012	10:40:23 AM	BCl3 valve closed
10/31/2012	10:40:23 AM	PH3 valve closed
10/31/2012	10:40:23 AM	SiCl4 pre valve closed
10/31/2012	10:40:23 AM	SiCl4 post valve closed
10/31/2012	10:40:23 AM	Main Vac valve closed
10/31/2012	10:40:23 AM	Bypass valve closed
10/31/2012	10:40:23 AM	H2 valve opened
10/31/2012	10:40:23 AM	Bubbler valve opened
10/31/2012	10:40:23 AM	Helium MFC set to  0.000000
10/31/2012	10:40:23 AM	H2 MFC set to  500.000000
10/31/2012	10:40:23 AM	BCl3 MFC set to  0.000000
10/31/2012	10:40:23 AM	PH3 MFC set to  0.000000
10/31/2012	10:40:23 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:40:23 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:40:23 AM	Tube furnace set to 0
10/31/2012	10:40:24 AM	Helium valve closed
10/31/2012	10:40:24 AM	BCl3 valve closed
10/31/2012	10:40:24 AM	PH3 valve closed
10/31/2012	10:40:24 AM	SiCl4 pre valve closed
10/31/2012	10:40:24 AM	SiCl4 post valve closed
10/31/2012	10:40:24 AM	Main Vac valve closed
10/31/2012	10:40:24 AM	Bypass valve closed
10/31/2012	10:40:24 AM	H2 valve opened
10/31/2012	10:40:24 AM	Bubbler valve opened
10/31/2012	10:40:24 AM	Helium MFC set to  0.000000
10/31/2012	10:40:24 AM	H2 MFC set to  500.000000
10/31/2012	10:40:24 AM	BCl3 MFC set to  0.000000
10/31/2012	10:40:24 AM	PH3 MFC set to  0.000000
10/31/2012	10:40:24 AM	SiCl4 MFC set to  0.000000
10/31/2012	10:40:24 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	10:40:25 AM	Tube furnace set to 1000
10/31/2012	11:00:25 AM	Helium valve closed
10/31/2012	11:00:25 AM	BCl3 valve closed
10/31/2012	11:00:25 AM	PH3 valve closed
10/31/2012	11:00:25 AM	Main Vac valve closed
10/31/2012	11:00:25 AM	Bypass valve closed
10/31/2012	11:00:25 AM	H2 valve opened
10/31/2012	11:00:25 AM	SiCl4 pre valve opened
10/31/2012	11:00:25 AM	SiCl4 post valve opened
10/31/2012	11:00:25 AM	Bubbler valve opened
10/31/2012	11:00:25 AM	Helium MFC set to  0.000000
10/31/2012	11:00:25 AM	H2 MFC set to  450.000000
10/31/2012	11:00:25 AM	BCl3 MFC set to  0.000000
10/31/2012	11:00:25 AM	PH3 MFC set to  0.000000
10/31/2012	11:00:25 AM	SiCl4 MFC set to  50.000000
10/31/2012	11:00:25 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	11:00:25 AM	Tube furnace set to 1000
10/31/2012	11:30:25 AM	Helium valve closed
10/31/2012	11:30:25 AM	BCl3 valve closed
10/31/2012	11:30:25 AM	PH3 valve closed
10/31/2012	11:30:25 AM	SiCl4 pre valve closed
10/31/2012	11:30:25 AM	SiCl4 post valve closed
10/31/2012	11:30:25 AM	Main Vac valve closed
10/31/2012	11:30:25 AM	Bypass valve closed
10/31/2012	11:30:25 AM	H2 valve opened
10/31/2012	11:30:25 AM	Bubbler valve opened
10/31/2012	11:30:25 AM	Helium MFC set to  0.000000
10/31/2012	11:30:25 AM	H2 MFC set to  500.000000
10/31/2012	11:30:25 AM	BCl3 MFC set to  0.000000
10/31/2012	11:30:25 AM	PH3 MFC set to  0.000000
10/31/2012	11:30:25 AM	SiCl4 MFC set to  0.000000
10/31/2012	11:30:25 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	11:30:25 AM	Tube furnace set to 950
10/31/2012	11:32:25 AM	Helium valve closed
10/31/2012	11:32:25 AM	BCl3 valve closed
10/31/2012	11:32:25 AM	PH3 valve closed
10/31/2012	11:32:25 AM	SiCl4 pre valve closed
10/31/2012	11:32:25 AM	SiCl4 post valve closed
10/31/2012	11:32:25 AM	Main Vac valve closed
10/31/2012	11:32:25 AM	Bypass valve closed
10/31/2012	11:32:25 AM	H2 valve opened
10/31/2012	11:32:25 AM	Bubbler valve opened
10/31/2012	11:32:25 AM	Helium MFC set to  0.000000
10/31/2012	11:32:25 AM	H2 MFC set to  500.000000
10/31/2012	11:32:25 AM	BCl3 MFC set to  0.000000
10/31/2012	11:32:25 AM	PH3 MFC set to  0.000000
10/31/2012	11:32:25 AM	SiCl4 MFC set to  0.000000
10/31/2012	11:32:25 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	11:32:25 AM	Tube furnace set to 900
10/31/2012	11:34:25 AM	Helium valve closed
10/31/2012	11:34:25 AM	BCl3 valve closed
10/31/2012	11:34:25 AM	PH3 valve closed
10/31/2012	11:34:25 AM	SiCl4 pre valve closed
10/31/2012	11:34:25 AM	SiCl4 post valve closed
10/31/2012	11:34:25 AM	Main Vac valve closed
10/31/2012	11:34:25 AM	Bypass valve closed
10/31/2012	11:34:25 AM	H2 valve opened
10/31/2012	11:34:25 AM	Bubbler valve opened
10/31/2012	11:34:25 AM	Helium MFC set to  0.000000
10/31/2012	11:34:25 AM	H2 MFC set to  500.000000
10/31/2012	11:34:25 AM	BCl3 MFC set to  0.000000
10/31/2012	11:34:25 AM	PH3 MFC set to  0.000000
10/31/2012	11:34:25 AM	SiCl4 MFC set to  0.000000
10/31/2012	11:34:25 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	11:34:26 AM	Tube furnace set to 850
10/31/2012	11:36:26 AM	H2 valve closed
10/31/2012	11:36:26 AM	BCl3 valve closed
10/31/2012	11:36:26 AM	PH3 valve closed
10/31/2012	11:36:26 AM	SiCl4 pre valve closed
10/31/2012	11:36:26 AM	SiCl4 post valve closed
10/31/2012	11:36:26 AM	Main Vac valve closed
10/31/2012	11:36:26 AM	Bypass valve closed
10/31/2012	11:36:26 AM	Helium valve opened
10/31/2012	11:36:26 AM	Bubbler valve opened
10/31/2012	11:36:26 AM	Helium MFC set to  500.000000
10/31/2012	11:36:26 AM	H2 MFC set to  0.000000
10/31/2012	11:36:26 AM	BCl3 MFC set to  0.000000
10/31/2012	11:36:26 AM	PH3 MFC set to  0.000000
10/31/2012	11:36:26 AM	SiCl4 MFC set to  0.000000
10/31/2012	11:36:26 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	11:36:26 AM	Tube furnace set to 800
10/31/2012	11:38:26 AM	H2 valve closed
10/31/2012	11:38:26 AM	BCl3 valve closed
10/31/2012	11:38:26 AM	PH3 valve closed
10/31/2012	11:38:26 AM	SiCl4 pre valve closed
10/31/2012	11:38:26 AM	SiCl4 post valve closed
10/31/2012	11:38:26 AM	Main Vac valve closed
10/31/2012	11:38:26 AM	Bypass valve closed
10/31/2012	11:38:26 AM	Helium valve opened
10/31/2012	11:38:26 AM	Bubbler valve opened
10/31/2012	11:38:26 AM	Helium MFC set to  500.000000
10/31/2012	11:38:26 AM	H2 MFC set to  0.000000
10/31/2012	11:38:26 AM	BCl3 MFC set to  0.000000
10/31/2012	11:38:26 AM	PH3 MFC set to  0.000000
10/31/2012	11:38:26 AM	SiCl4 MFC set to  0.000000
10/31/2012	11:38:26 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	11:38:26 AM	Tube furnace set to 750
10/31/2012	11:40:26 AM	H2 valve closed
10/31/2012	11:40:26 AM	BCl3 valve closed
10/31/2012	11:40:26 AM	PH3 valve closed
10/31/2012	11:40:26 AM	SiCl4 pre valve closed
10/31/2012	11:40:26 AM	SiCl4 post valve closed
10/31/2012	11:40:26 AM	Main Vac valve closed
10/31/2012	11:40:26 AM	Bypass valve closed
10/31/2012	11:40:26 AM	Helium valve opened
10/31/2012	11:40:26 AM	Bubbler valve opened
10/31/2012	11:40:26 AM	Helium MFC set to  500.000000
10/31/2012	11:40:26 AM	H2 MFC set to  0.000000
10/31/2012	11:40:26 AM	BCl3 MFC set to  0.000000
10/31/2012	11:40:26 AM	PH3 MFC set to  0.000000
10/31/2012	11:40:26 AM	SiCl4 MFC set to  0.000000
10/31/2012	11:40:26 AM	Bypass solenoid MFC set to  0.000000
10/31/2012	11:40:26 AM	Tube furnace set to 0
10/31/2012	12:00:26 PM	Helium valve closed
10/31/2012	12:00:26 PM	H2 valve closed
10/31/2012	12:00:26 PM	BCl3 valve closed
10/31/2012	12:00:26 PM	PH3 valve closed
10/31/2012	12:00:26 PM	SiCl4 pre valve closed
10/31/2012	12:00:26 PM	SiCl4 post valve closed
10/31/2012	12:00:26 PM	Main Vac valve closed
10/31/2012	12:00:26 PM	Bypass valve closed
10/31/2012	12:00:26 PM	Bubbler valve closed
10/31/2012	12:00:26 PM	Helium MFC set to  0.000000
10/31/2012	12:00:26 PM	H2 MFC set to  0.000000
10/31/2012	12:00:26 PM	BCl3 MFC set to  0.000000
10/31/2012	12:00:26 PM	PH3 MFC set to  0.000000
10/31/2012	12:00:26 PM	SiCl4 MFC set to  0.000000
10/31/2012	12:00:26 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	12:00:26 PM	Tube furnace set to 0
10/31/2012	12:00:27 PM	Helium valve closed
10/31/2012	12:00:27 PM	H2 valve closed
10/31/2012	12:00:27 PM	BCl3 valve closed
10/31/2012	12:00:27 PM	PH3 valve closed
10/31/2012	12:00:27 PM	SiCl4 pre valve closed
10/31/2012	12:00:27 PM	SiCl4 post valve closed
10/31/2012	12:00:27 PM	Main Vac valve closed
10/31/2012	12:00:27 PM	Bubbler valve closed
10/31/2012	12:00:28 PM	Bypass valve opened
10/31/2012	12:00:28 PM	Helium MFC set to  0.000000
10/31/2012	12:00:28 PM	H2 MFC set to  0.000000
10/31/2012	12:00:28 PM	BCl3 MFC set to  0.000000
10/31/2012	12:00:28 PM	PH3 MFC set to  0.000000
10/31/2012	12:00:28 PM	SiCl4 MFC set to  0.000000
10/31/2012	12:00:28 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	12:00:28 PM	Tube furnace set to 0
10/31/2012	12:01:25 PM	Helium valve closed
10/31/2012	12:01:25 PM	H2 valve closed
10/31/2012	12:01:25 PM	BCl3 valve closed
10/31/2012	12:01:25 PM	PH3 valve closed
10/31/2012	12:01:25 PM	SiCl4 pre valve closed
10/31/2012	12:01:25 PM	SiCl4 post valve closed
10/31/2012	12:01:25 PM	Main Vac valve closed
10/31/2012	12:01:25 PM	Bubbler valve closed
10/31/2012	12:01:25 PM	Bypass valve opened
10/31/2012	12:01:25 PM	Helium MFC set to  0.000000
10/31/2012	12:01:25 PM	H2 MFC set to  0.000000
10/31/2012	12:01:25 PM	BCl3 MFC set to  0.000000
10/31/2012	12:01:25 PM	PH3 MFC set to  0.000000
10/31/2012	12:01:25 PM	SiCl4 MFC set to  0.000000
10/31/2012	12:01:25 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	12:01:25 PM	Tube furnace set to 0
10/31/2012	12:02:25 PM	Helium valve closed
10/31/2012	12:02:25 PM	H2 valve closed
10/31/2012	12:02:25 PM	BCl3 valve closed
10/31/2012	12:02:25 PM	PH3 valve closed
10/31/2012	12:02:25 PM	SiCl4 pre valve closed
10/31/2012	12:02:25 PM	SiCl4 post valve closed
10/31/2012	12:02:25 PM	Bypass valve closed
10/31/2012	12:02:25 PM	Bubbler valve closed
10/31/2012	12:02:25 PM	Main Vac valve opened
10/31/2012	12:02:25 PM	Helium MFC set to  0.000000
10/31/2012	12:02:25 PM	H2 MFC set to  0.000000
10/31/2012	12:02:25 PM	BCl3 MFC set to  0.000000
10/31/2012	12:02:25 PM	PH3 MFC set to  0.000000
10/31/2012	12:02:25 PM	SiCl4 MFC set to  0.000000
10/31/2012	12:02:25 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	12:02:25 PM	Tube furnace set to 0
10/31/2012	12:02:26 PM	Run finished at 12:02 PM
10/31/2012	1:03:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2012	1:03:08 PM	Recipe started at 1:03 PM
10/31/2012	1:03:08 PM	Helium valve closed
10/31/2012	1:03:08 PM	H2 valve closed
10/31/2012	1:03:08 PM	BCl3 valve closed
10/31/2012	1:03:08 PM	PH3 valve closed
10/31/2012	1:03:08 PM	SiCl4 pre valve closed
10/31/2012	1:03:08 PM	SiCl4 post valve closed
10/31/2012	1:03:08 PM	Main Vac valve closed
10/31/2012	1:03:08 PM	Bypass valve closed
10/31/2012	1:03:08 PM	Bubbler valve closed
10/31/2012	1:03:08 PM	Helium MFC set to  0.000000
10/31/2012	1:03:08 PM	H2 MFC set to  0.000000
10/31/2012	1:03:08 PM	BCl3 MFC set to  0.000000
10/31/2012	1:03:08 PM	PH3 MFC set to  0.000000
10/31/2012	1:03:08 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:03:08 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:03:08 PM	Tube furnace set to 0
10/31/2012	1:03:11 PM	H2 valve closed
10/31/2012	1:03:11 PM	BCl3 valve closed
10/31/2012	1:03:11 PM	PH3 valve closed
10/31/2012	1:03:11 PM	SiCl4 pre valve closed
10/31/2012	1:03:11 PM	SiCl4 post valve closed
10/31/2012	1:03:11 PM	Main Vac valve closed
10/31/2012	1:03:11 PM	Bypass valve closed
10/31/2012	1:03:11 PM	Bubbler valve closed
10/31/2012	1:03:11 PM	Helium valve opened
10/31/2012	1:03:11 PM	Helium MFC set to  500.000000
10/31/2012	1:03:11 PM	H2 MFC set to  0.000000
10/31/2012	1:03:11 PM	BCl3 MFC set to  0.000000
10/31/2012	1:03:11 PM	PH3 MFC set to  0.000000
10/31/2012	1:03:11 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:03:11 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:03:12 PM	Tube furnace set to 0
10/31/2012	1:03:46 PM	Helium valve closed
10/31/2012	1:03:46 PM	H2 valve closed
10/31/2012	1:03:46 PM	BCl3 valve closed
10/31/2012	1:03:46 PM	PH3 valve closed
10/31/2012	1:03:46 PM	SiCl4 pre valve closed
10/31/2012	1:03:46 PM	SiCl4 post valve closed
10/31/2012	1:03:46 PM	Main Vac valve closed
10/31/2012	1:03:46 PM	Bypass valve closed
10/31/2012	1:03:46 PM	Bubbler valve closed
10/31/2012	1:03:46 PM	Helium MFC set to  0.000000
10/31/2012	1:03:46 PM	H2 MFC set to  0.000000
10/31/2012	1:03:46 PM	BCl3 MFC set to  0.000000
10/31/2012	1:03:46 PM	PH3 MFC set to  0.000000
10/31/2012	1:03:46 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:03:46 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:03:46 PM	Tube furnace set to 0
10/31/2012	1:03:47 PM	Run finished at 1:03 PM
10/31/2012	1:03:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2012	1:06:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/31/2012	1:06:13 PM	Recipe started at 1:06 PM
10/31/2012	1:06:13 PM	Helium valve closed
10/31/2012	1:06:13 PM	H2 valve closed
10/31/2012	1:06:13 PM	BCl3 valve closed
10/31/2012	1:06:13 PM	PH3 valve closed
10/31/2012	1:06:13 PM	SiCl4 pre valve closed
10/31/2012	1:06:13 PM	SiCl4 post valve closed
10/31/2012	1:06:13 PM	Main Vac valve closed
10/31/2012	1:06:13 PM	Bubbler valve closed
10/31/2012	1:06:13 PM	Bypass valve opened
10/31/2012	1:06:13 PM	Helium MFC set to  0.000000
10/31/2012	1:06:13 PM	H2 MFC set to  0.000000
10/31/2012	1:06:13 PM	BCl3 MFC set to  0.000000
10/31/2012	1:06:13 PM	PH3 MFC set to  0.000000
10/31/2012	1:06:13 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:06:13 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:06:13 PM	Tube furnace set to 0
10/31/2012	1:07:34 PM	Helium valve closed
10/31/2012	1:07:34 PM	H2 valve closed
10/31/2012	1:07:34 PM	BCl3 valve closed
10/31/2012	1:07:34 PM	PH3 valve closed
10/31/2012	1:07:34 PM	SiCl4 pre valve closed
10/31/2012	1:07:34 PM	SiCl4 post valve closed
10/31/2012	1:07:34 PM	Main Vac valve closed
10/31/2012	1:07:34 PM	Bubbler valve closed
10/31/2012	1:07:34 PM	Bypass valve opened
10/31/2012	1:07:34 PM	Helium MFC set to  0.000000
10/31/2012	1:07:34 PM	H2 MFC set to  0.000000
10/31/2012	1:07:34 PM	BCl3 MFC set to  0.000000
10/31/2012	1:07:34 PM	PH3 MFC set to  0.000000
10/31/2012	1:07:34 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:07:34 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:07:34 PM	Tube furnace set to 0
10/31/2012	1:08:34 PM	Helium valve closed
10/31/2012	1:08:34 PM	H2 valve closed
10/31/2012	1:08:34 PM	BCl3 valve closed
10/31/2012	1:08:34 PM	PH3 valve closed
10/31/2012	1:08:34 PM	SiCl4 pre valve closed
10/31/2012	1:08:34 PM	SiCl4 post valve closed
10/31/2012	1:08:34 PM	Bypass valve closed
10/31/2012	1:08:34 PM	Bubbler valve closed
10/31/2012	1:08:34 PM	Main Vac valve opened
10/31/2012	1:08:34 PM	Helium MFC set to  0.000000
10/31/2012	1:08:34 PM	H2 MFC set to  0.000000
10/31/2012	1:08:34 PM	BCl3 MFC set to  0.000000
10/31/2012	1:08:34 PM	PH3 MFC set to  0.000000
10/31/2012	1:08:34 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:08:34 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:08:34 PM	Tube furnace set to 0
10/31/2012	1:08:35 PM	Run finished at 1:08 PM
10/31/2012	1:08:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/31/2012	1:26:37 PM	Recipe started at 1:26 PM
10/31/2012	1:26:37 PM	Helium valve closed
10/31/2012	1:26:37 PM	H2 valve closed
10/31/2012	1:26:37 PM	BCl3 valve closed
10/31/2012	1:26:37 PM	PH3 valve closed
10/31/2012	1:26:37 PM	SiCl4 pre valve closed
10/31/2012	1:26:37 PM	SiCl4 post valve closed
10/31/2012	1:26:37 PM	Bypass valve closed
10/31/2012	1:26:37 PM	Bubbler valve closed
10/31/2012	1:26:37 PM	Main Vac valve opened
10/31/2012	1:26:37 PM	Helium MFC set to  0.000000
10/31/2012	1:26:37 PM	H2 MFC set to  0.000000
10/31/2012	1:26:37 PM	BCl3 MFC set to  0.000000
10/31/2012	1:26:37 PM	PH3 MFC set to  0.000000
10/31/2012	1:26:37 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:26:37 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:26:37 PM	Tube furnace set to 0
10/31/2012	1:27:07 PM	H2 valve closed
10/31/2012	1:27:07 PM	BCl3 valve closed
10/31/2012	1:27:07 PM	PH3 valve closed
10/31/2012	1:27:07 PM	SiCl4 pre valve closed
10/31/2012	1:27:07 PM	SiCl4 post valve closed
10/31/2012	1:27:07 PM	Bypass valve closed
10/31/2012	1:27:07 PM	Bubbler valve closed
10/31/2012	1:27:07 PM	Helium valve opened
10/31/2012	1:27:07 PM	Main Vac valve opened
10/31/2012	1:27:07 PM	Helium MFC set to  20.000000
10/31/2012	1:27:07 PM	H2 MFC set to  0.000000
10/31/2012	1:27:07 PM	BCl3 MFC set to  0.000000
10/31/2012	1:27:07 PM	PH3 MFC set to  0.000000
10/31/2012	1:27:07 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:27:07 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:27:07 PM	Tube furnace set to 0
10/31/2012	1:27:37 PM	Helium valve closed
10/31/2012	1:27:37 PM	H2 valve closed
10/31/2012	1:27:37 PM	BCl3 valve closed
10/31/2012	1:27:37 PM	PH3 valve closed
10/31/2012	1:27:37 PM	SiCl4 pre valve closed
10/31/2012	1:27:37 PM	SiCl4 post valve closed
10/31/2012	1:27:37 PM	Bypass valve closed
10/31/2012	1:27:37 PM	Bubbler valve closed
10/31/2012	1:27:37 PM	Main Vac valve opened
10/31/2012	1:27:37 PM	Helium MFC set to  0.000000
10/31/2012	1:27:37 PM	H2 MFC set to  0.000000
10/31/2012	1:27:37 PM	BCl3 MFC set to  0.000000
10/31/2012	1:27:37 PM	PH3 MFC set to  0.000000
10/31/2012	1:27:37 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:27:37 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:27:38 PM	Tube furnace set to 0
10/31/2012	1:28:08 PM	H2 valve closed
10/31/2012	1:28:08 PM	BCl3 valve closed
10/31/2012	1:28:08 PM	PH3 valve closed
10/31/2012	1:28:08 PM	SiCl4 pre valve closed
10/31/2012	1:28:08 PM	SiCl4 post valve closed
10/31/2012	1:28:08 PM	Bypass valve closed
10/31/2012	1:28:08 PM	Bubbler valve closed
10/31/2012	1:28:08 PM	Helium valve opened
10/31/2012	1:28:08 PM	Main Vac valve opened
10/31/2012	1:28:08 PM	Helium MFC set to  20.000000
10/31/2012	1:28:08 PM	H2 MFC set to  0.000000
10/31/2012	1:28:08 PM	BCl3 MFC set to  0.000000
10/31/2012	1:28:08 PM	PH3 MFC set to  0.000000
10/31/2012	1:28:08 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:28:08 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:28:08 PM	Tube furnace set to 0
10/31/2012	1:28:38 PM	Helium valve closed
10/31/2012	1:28:38 PM	H2 valve closed
10/31/2012	1:28:38 PM	BCl3 valve closed
10/31/2012	1:28:38 PM	PH3 valve closed
10/31/2012	1:28:38 PM	SiCl4 pre valve closed
10/31/2012	1:28:38 PM	SiCl4 post valve closed
10/31/2012	1:28:38 PM	Bypass valve closed
10/31/2012	1:28:38 PM	Bubbler valve closed
10/31/2012	1:28:38 PM	Main Vac valve opened
10/31/2012	1:28:38 PM	Helium MFC set to  0.000000
10/31/2012	1:28:38 PM	H2 MFC set to  0.000000
10/31/2012	1:28:38 PM	BCl3 MFC set to  0.000000
10/31/2012	1:28:38 PM	PH3 MFC set to  0.000000
10/31/2012	1:28:38 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:28:38 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:28:38 PM	Tube furnace set to 0
10/31/2012	1:29:08 PM	H2 valve closed
10/31/2012	1:29:08 PM	BCl3 valve closed
10/31/2012	1:29:08 PM	PH3 valve closed
10/31/2012	1:29:08 PM	SiCl4 pre valve closed
10/31/2012	1:29:08 PM	SiCl4 post valve closed
10/31/2012	1:29:08 PM	Bypass valve closed
10/31/2012	1:29:08 PM	Bubbler valve closed
10/31/2012	1:29:08 PM	Helium valve opened
10/31/2012	1:29:08 PM	Main Vac valve opened
10/31/2012	1:29:08 PM	Helium MFC set to  20.000000
10/31/2012	1:29:08 PM	H2 MFC set to  0.000000
10/31/2012	1:29:08 PM	BCl3 MFC set to  0.000000
10/31/2012	1:29:08 PM	PH3 MFC set to  0.000000
10/31/2012	1:29:08 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:29:08 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:29:08 PM	Tube furnace set to 0
10/31/2012	1:29:38 PM	Helium valve closed
10/31/2012	1:29:38 PM	H2 valve closed
10/31/2012	1:29:38 PM	BCl3 valve closed
10/31/2012	1:29:38 PM	PH3 valve closed
10/31/2012	1:29:38 PM	SiCl4 pre valve closed
10/31/2012	1:29:38 PM	SiCl4 post valve closed
10/31/2012	1:29:38 PM	Bypass valve closed
10/31/2012	1:29:38 PM	Bubbler valve closed
10/31/2012	1:29:38 PM	Main Vac valve opened
10/31/2012	1:29:38 PM	Helium MFC set to  0.000000
10/31/2012	1:29:38 PM	H2 MFC set to  0.000000
10/31/2012	1:29:38 PM	BCl3 MFC set to  0.000000
10/31/2012	1:29:38 PM	PH3 MFC set to  0.000000
10/31/2012	1:29:38 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:29:38 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:29:39 PM	Tube furnace set to 0
10/31/2012	1:30:09 PM	H2 valve closed
10/31/2012	1:30:09 PM	BCl3 valve closed
10/31/2012	1:30:09 PM	PH3 valve closed
10/31/2012	1:30:09 PM	SiCl4 pre valve closed
10/31/2012	1:30:09 PM	SiCl4 post valve closed
10/31/2012	1:30:09 PM	Bypass valve closed
10/31/2012	1:30:09 PM	Bubbler valve closed
10/31/2012	1:30:09 PM	Helium valve opened
10/31/2012	1:30:09 PM	Main Vac valve opened
10/31/2012	1:30:09 PM	Helium MFC set to  20.000000
10/31/2012	1:30:09 PM	H2 MFC set to  0.000000
10/31/2012	1:30:09 PM	BCl3 MFC set to  0.000000
10/31/2012	1:30:09 PM	PH3 MFC set to  0.000000
10/31/2012	1:30:09 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:30:09 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:30:09 PM	Tube furnace set to 0
10/31/2012	1:30:39 PM	Helium valve closed
10/31/2012	1:30:39 PM	H2 valve closed
10/31/2012	1:30:39 PM	BCl3 valve closed
10/31/2012	1:30:39 PM	PH3 valve closed
10/31/2012	1:30:39 PM	SiCl4 pre valve closed
10/31/2012	1:30:39 PM	SiCl4 post valve closed
10/31/2012	1:30:39 PM	Bypass valve closed
10/31/2012	1:30:39 PM	Bubbler valve closed
10/31/2012	1:30:39 PM	Main Vac valve opened
10/31/2012	1:30:39 PM	Helium MFC set to  0.000000
10/31/2012	1:30:39 PM	H2 MFC set to  0.000000
10/31/2012	1:30:39 PM	BCl3 MFC set to  0.000000
10/31/2012	1:30:39 PM	PH3 MFC set to  0.000000
10/31/2012	1:30:39 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:30:39 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:30:39 PM	Tube furnace set to 0
10/31/2012	1:31:09 PM	H2 valve closed
10/31/2012	1:31:09 PM	BCl3 valve closed
10/31/2012	1:31:09 PM	PH3 valve closed
10/31/2012	1:31:09 PM	SiCl4 pre valve closed
10/31/2012	1:31:09 PM	SiCl4 post valve closed
10/31/2012	1:31:09 PM	Bypass valve closed
10/31/2012	1:31:09 PM	Bubbler valve closed
10/31/2012	1:31:09 PM	Helium valve opened
10/31/2012	1:31:09 PM	Main Vac valve opened
10/31/2012	1:31:09 PM	Helium MFC set to  20.000000
10/31/2012	1:31:09 PM	H2 MFC set to  0.000000
10/31/2012	1:31:09 PM	BCl3 MFC set to  0.000000
10/31/2012	1:31:09 PM	PH3 MFC set to  0.000000
10/31/2012	1:31:09 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:31:09 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:31:09 PM	Tube furnace set to 0
10/31/2012	1:31:39 PM	Helium valve closed
10/31/2012	1:31:39 PM	H2 valve closed
10/31/2012	1:31:39 PM	BCl3 valve closed
10/31/2012	1:31:39 PM	PH3 valve closed
10/31/2012	1:31:39 PM	SiCl4 pre valve closed
10/31/2012	1:31:39 PM	SiCl4 post valve closed
10/31/2012	1:31:39 PM	Bypass valve closed
10/31/2012	1:31:39 PM	Bubbler valve closed
10/31/2012	1:31:39 PM	Main Vac valve opened
10/31/2012	1:31:39 PM	Helium MFC set to  0.000000
10/31/2012	1:31:39 PM	H2 MFC set to  0.000000
10/31/2012	1:31:39 PM	BCl3 MFC set to  0.000000
10/31/2012	1:31:39 PM	PH3 MFC set to  0.000000
10/31/2012	1:31:39 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:31:39 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:31:40 PM	Tube furnace set to 0
10/31/2012	1:32:10 PM	H2 valve closed
10/31/2012	1:32:10 PM	BCl3 valve closed
10/31/2012	1:32:10 PM	PH3 valve closed
10/31/2012	1:32:10 PM	SiCl4 pre valve closed
10/31/2012	1:32:10 PM	SiCl4 post valve closed
10/31/2012	1:32:10 PM	Bypass valve closed
10/31/2012	1:32:10 PM	Bubbler valve closed
10/31/2012	1:32:10 PM	Helium valve opened
10/31/2012	1:32:10 PM	Main Vac valve opened
10/31/2012	1:32:10 PM	Helium MFC set to  20.000000
10/31/2012	1:32:10 PM	H2 MFC set to  0.000000
10/31/2012	1:32:10 PM	BCl3 MFC set to  0.000000
10/31/2012	1:32:10 PM	PH3 MFC set to  0.000000
10/31/2012	1:32:10 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:32:10 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:32:10 PM	Tube furnace set to 0
10/31/2012	1:32:40 PM	Helium valve closed
10/31/2012	1:32:40 PM	H2 valve closed
10/31/2012	1:32:40 PM	BCl3 valve closed
10/31/2012	1:32:40 PM	PH3 valve closed
10/31/2012	1:32:40 PM	SiCl4 pre valve closed
10/31/2012	1:32:40 PM	SiCl4 post valve closed
10/31/2012	1:32:40 PM	Bypass valve closed
10/31/2012	1:32:40 PM	Bubbler valve closed
10/31/2012	1:32:40 PM	Main Vac valve opened
10/31/2012	1:32:40 PM	Helium MFC set to  0.000000
10/31/2012	1:32:40 PM	H2 MFC set to  0.000000
10/31/2012	1:32:40 PM	BCl3 MFC set to  0.000000
10/31/2012	1:32:40 PM	PH3 MFC set to  0.000000
10/31/2012	1:32:40 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:32:40 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:32:40 PM	Tube furnace set to 0
10/31/2012	1:33:10 PM	H2 valve closed
10/31/2012	1:33:10 PM	BCl3 valve closed
10/31/2012	1:33:10 PM	PH3 valve closed
10/31/2012	1:33:10 PM	SiCl4 pre valve closed
10/31/2012	1:33:10 PM	SiCl4 post valve closed
10/31/2012	1:33:10 PM	Bypass valve closed
10/31/2012	1:33:10 PM	Bubbler valve closed
10/31/2012	1:33:10 PM	Helium valve opened
10/31/2012	1:33:10 PM	Main Vac valve opened
10/31/2012	1:33:10 PM	Helium MFC set to  20.000000
10/31/2012	1:33:10 PM	H2 MFC set to  0.000000
10/31/2012	1:33:10 PM	BCl3 MFC set to  0.000000
10/31/2012	1:33:10 PM	PH3 MFC set to  0.000000
10/31/2012	1:33:10 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:33:10 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:33:10 PM	Tube furnace set to 0
10/31/2012	1:33:40 PM	Helium valve closed
10/31/2012	1:33:40 PM	H2 valve closed
10/31/2012	1:33:40 PM	BCl3 valve closed
10/31/2012	1:33:40 PM	PH3 valve closed
10/31/2012	1:33:40 PM	SiCl4 pre valve closed
10/31/2012	1:33:40 PM	SiCl4 post valve closed
10/31/2012	1:33:40 PM	Bypass valve closed
10/31/2012	1:33:40 PM	Bubbler valve closed
10/31/2012	1:33:40 PM	Main Vac valve opened
10/31/2012	1:33:40 PM	Helium MFC set to  0.000000
10/31/2012	1:33:40 PM	H2 MFC set to  0.000000
10/31/2012	1:33:40 PM	BCl3 MFC set to  0.000000
10/31/2012	1:33:40 PM	PH3 MFC set to  0.000000
10/31/2012	1:33:40 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:33:40 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:33:41 PM	Tube furnace set to 0
10/31/2012	1:34:11 PM	H2 valve closed
10/31/2012	1:34:11 PM	BCl3 valve closed
10/31/2012	1:34:11 PM	PH3 valve closed
10/31/2012	1:34:11 PM	SiCl4 pre valve closed
10/31/2012	1:34:11 PM	SiCl4 post valve closed
10/31/2012	1:34:11 PM	Bypass valve closed
10/31/2012	1:34:11 PM	Bubbler valve closed
10/31/2012	1:34:11 PM	Helium valve opened
10/31/2012	1:34:11 PM	Main Vac valve opened
10/31/2012	1:34:11 PM	Helium MFC set to  20.000000
10/31/2012	1:34:11 PM	H2 MFC set to  0.000000
10/31/2012	1:34:11 PM	BCl3 MFC set to  0.000000
10/31/2012	1:34:11 PM	PH3 MFC set to  0.000000
10/31/2012	1:34:11 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:34:11 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:34:11 PM	Tube furnace set to 0
10/31/2012	1:34:41 PM	Helium valve closed
10/31/2012	1:34:41 PM	H2 valve closed
10/31/2012	1:34:41 PM	BCl3 valve closed
10/31/2012	1:34:41 PM	PH3 valve closed
10/31/2012	1:34:41 PM	SiCl4 pre valve closed
10/31/2012	1:34:41 PM	SiCl4 post valve closed
10/31/2012	1:34:41 PM	Bypass valve closed
10/31/2012	1:34:41 PM	Bubbler valve closed
10/31/2012	1:34:41 PM	Main Vac valve opened
10/31/2012	1:34:41 PM	Helium MFC set to  0.000000
10/31/2012	1:34:41 PM	H2 MFC set to  0.000000
10/31/2012	1:34:41 PM	BCl3 MFC set to  0.000000
10/31/2012	1:34:41 PM	PH3 MFC set to  0.000000
10/31/2012	1:34:41 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:34:41 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:34:41 PM	Tube furnace set to 0
10/31/2012	1:35:11 PM	H2 valve closed
10/31/2012	1:35:11 PM	BCl3 valve closed
10/31/2012	1:35:11 PM	PH3 valve closed
10/31/2012	1:35:11 PM	SiCl4 pre valve closed
10/31/2012	1:35:11 PM	SiCl4 post valve closed
10/31/2012	1:35:11 PM	Bypass valve closed
10/31/2012	1:35:11 PM	Bubbler valve closed
10/31/2012	1:35:11 PM	Helium valve opened
10/31/2012	1:35:11 PM	Main Vac valve opened
10/31/2012	1:35:11 PM	Helium MFC set to  20.000000
10/31/2012	1:35:11 PM	H2 MFC set to  0.000000
10/31/2012	1:35:11 PM	BCl3 MFC set to  0.000000
10/31/2012	1:35:11 PM	PH3 MFC set to  0.000000
10/31/2012	1:35:11 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:35:11 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:35:11 PM	Tube furnace set to 0
10/31/2012	1:35:41 PM	Helium valve closed
10/31/2012	1:35:41 PM	H2 valve closed
10/31/2012	1:35:41 PM	BCl3 valve closed
10/31/2012	1:35:41 PM	PH3 valve closed
10/31/2012	1:35:41 PM	SiCl4 pre valve closed
10/31/2012	1:35:41 PM	SiCl4 post valve closed
10/31/2012	1:35:41 PM	Bypass valve closed
10/31/2012	1:35:41 PM	Bubbler valve closed
10/31/2012	1:35:41 PM	Main Vac valve opened
10/31/2012	1:35:41 PM	Helium MFC set to  0.000000
10/31/2012	1:35:41 PM	H2 MFC set to  0.000000
10/31/2012	1:35:41 PM	BCl3 MFC set to  0.000000
10/31/2012	1:35:41 PM	PH3 MFC set to  0.000000
10/31/2012	1:35:41 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:35:41 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:35:42 PM	Tube furnace set to 200
10/31/2012	1:36:12 PM	H2 valve closed
10/31/2012	1:36:12 PM	BCl3 valve closed
10/31/2012	1:36:12 PM	PH3 valve closed
10/31/2012	1:36:12 PM	SiCl4 pre valve closed
10/31/2012	1:36:12 PM	SiCl4 post valve closed
10/31/2012	1:36:12 PM	Bypass valve closed
10/31/2012	1:36:12 PM	Bubbler valve closed
10/31/2012	1:36:12 PM	Helium valve opened
10/31/2012	1:36:12 PM	Main Vac valve opened
10/31/2012	1:36:12 PM	Helium MFC set to  20.000000
10/31/2012	1:36:12 PM	H2 MFC set to  0.000000
10/31/2012	1:36:12 PM	BCl3 MFC set to  0.000000
10/31/2012	1:36:12 PM	PH3 MFC set to  0.000000
10/31/2012	1:36:12 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:36:12 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:36:12 PM	Tube furnace set to 200
10/31/2012	1:36:42 PM	Helium valve closed
10/31/2012	1:36:42 PM	H2 valve closed
10/31/2012	1:36:42 PM	BCl3 valve closed
10/31/2012	1:36:42 PM	PH3 valve closed
10/31/2012	1:36:42 PM	SiCl4 pre valve closed
10/31/2012	1:36:42 PM	SiCl4 post valve closed
10/31/2012	1:36:42 PM	Bypass valve closed
10/31/2012	1:36:42 PM	Bubbler valve closed
10/31/2012	1:36:42 PM	Main Vac valve opened
10/31/2012	1:36:42 PM	Helium MFC set to  0.000000
10/31/2012	1:36:42 PM	H2 MFC set to  0.000000
10/31/2012	1:36:42 PM	BCl3 MFC set to  0.000000
10/31/2012	1:36:42 PM	PH3 MFC set to  0.000000
10/31/2012	1:36:42 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:36:42 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:36:42 PM	Tube furnace set to 200
10/31/2012	1:37:12 PM	H2 valve closed
10/31/2012	1:37:12 PM	BCl3 valve closed
10/31/2012	1:37:12 PM	PH3 valve closed
10/31/2012	1:37:12 PM	SiCl4 pre valve closed
10/31/2012	1:37:12 PM	SiCl4 post valve closed
10/31/2012	1:37:12 PM	Bypass valve closed
10/31/2012	1:37:12 PM	Bubbler valve closed
10/31/2012	1:37:12 PM	Helium valve opened
10/31/2012	1:37:12 PM	Main Vac valve opened
10/31/2012	1:37:12 PM	Helium MFC set to  20.000000
10/31/2012	1:37:12 PM	H2 MFC set to  0.000000
10/31/2012	1:37:12 PM	BCl3 MFC set to  0.000000
10/31/2012	1:37:12 PM	PH3 MFC set to  0.000000
10/31/2012	1:37:12 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:37:12 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:37:12 PM	Tube furnace set to 200
10/31/2012	1:37:42 PM	Helium valve closed
10/31/2012	1:37:42 PM	H2 valve closed
10/31/2012	1:37:42 PM	BCl3 valve closed
10/31/2012	1:37:42 PM	PH3 valve closed
10/31/2012	1:37:42 PM	SiCl4 pre valve closed
10/31/2012	1:37:42 PM	SiCl4 post valve closed
10/31/2012	1:37:42 PM	Bypass valve closed
10/31/2012	1:37:42 PM	Bubbler valve closed
10/31/2012	1:37:42 PM	Main Vac valve opened
10/31/2012	1:37:42 PM	Helium MFC set to  0.000000
10/31/2012	1:37:42 PM	H2 MFC set to  0.000000
10/31/2012	1:37:42 PM	BCl3 MFC set to  0.000000
10/31/2012	1:37:42 PM	PH3 MFC set to  0.000000
10/31/2012	1:37:42 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:37:42 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:37:43 PM	Tube furnace set to 200
10/31/2012	1:38:13 PM	H2 valve closed
10/31/2012	1:38:13 PM	BCl3 valve closed
10/31/2012	1:38:13 PM	PH3 valve closed
10/31/2012	1:38:13 PM	SiCl4 pre valve closed
10/31/2012	1:38:13 PM	SiCl4 post valve closed
10/31/2012	1:38:13 PM	Bypass valve closed
10/31/2012	1:38:13 PM	Bubbler valve closed
10/31/2012	1:38:13 PM	Helium valve opened
10/31/2012	1:38:13 PM	Main Vac valve opened
10/31/2012	1:38:13 PM	Helium MFC set to  20.000000
10/31/2012	1:38:13 PM	H2 MFC set to  0.000000
10/31/2012	1:38:13 PM	BCl3 MFC set to  0.000000
10/31/2012	1:38:13 PM	PH3 MFC set to  0.000000
10/31/2012	1:38:13 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:38:13 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:38:13 PM	Tube furnace set to 200
10/31/2012	1:38:43 PM	Helium valve closed
10/31/2012	1:38:43 PM	H2 valve closed
10/31/2012	1:38:43 PM	BCl3 valve closed
10/31/2012	1:38:43 PM	PH3 valve closed
10/31/2012	1:38:43 PM	SiCl4 pre valve closed
10/31/2012	1:38:43 PM	SiCl4 post valve closed
10/31/2012	1:38:43 PM	Bypass valve closed
10/31/2012	1:38:43 PM	Bubbler valve closed
10/31/2012	1:38:43 PM	Main Vac valve opened
10/31/2012	1:38:43 PM	Helium MFC set to  0.000000
10/31/2012	1:38:43 PM	H2 MFC set to  0.000000
10/31/2012	1:38:43 PM	BCl3 MFC set to  0.000000
10/31/2012	1:38:43 PM	PH3 MFC set to  0.000000
10/31/2012	1:38:43 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:38:43 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:38:43 PM	Tube furnace set to 200
10/31/2012	1:39:13 PM	H2 valve closed
10/31/2012	1:39:13 PM	BCl3 valve closed
10/31/2012	1:39:13 PM	PH3 valve closed
10/31/2012	1:39:13 PM	SiCl4 pre valve closed
10/31/2012	1:39:13 PM	SiCl4 post valve closed
10/31/2012	1:39:13 PM	Bypass valve closed
10/31/2012	1:39:13 PM	Bubbler valve closed
10/31/2012	1:39:13 PM	Helium valve opened
10/31/2012	1:39:13 PM	Main Vac valve opened
10/31/2012	1:39:13 PM	Helium MFC set to  20.000000
10/31/2012	1:39:13 PM	H2 MFC set to  0.000000
10/31/2012	1:39:13 PM	BCl3 MFC set to  0.000000
10/31/2012	1:39:13 PM	PH3 MFC set to  0.000000
10/31/2012	1:39:13 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:39:13 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:39:13 PM	Tube furnace set to 200
10/31/2012	1:39:43 PM	Helium valve closed
10/31/2012	1:39:43 PM	H2 valve closed
10/31/2012	1:39:43 PM	BCl3 valve closed
10/31/2012	1:39:43 PM	PH3 valve closed
10/31/2012	1:39:43 PM	SiCl4 pre valve closed
10/31/2012	1:39:43 PM	SiCl4 post valve closed
10/31/2012	1:39:43 PM	Bypass valve closed
10/31/2012	1:39:43 PM	Bubbler valve closed
10/31/2012	1:39:43 PM	Main Vac valve opened
10/31/2012	1:39:43 PM	Helium MFC set to  0.000000
10/31/2012	1:39:43 PM	H2 MFC set to  0.000000
10/31/2012	1:39:43 PM	BCl3 MFC set to  0.000000
10/31/2012	1:39:43 PM	PH3 MFC set to  0.000000
10/31/2012	1:39:43 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:39:43 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:39:44 PM	Tube furnace set to 200
10/31/2012	1:40:14 PM	H2 valve closed
10/31/2012	1:40:14 PM	BCl3 valve closed
10/31/2012	1:40:14 PM	PH3 valve closed
10/31/2012	1:40:14 PM	SiCl4 pre valve closed
10/31/2012	1:40:14 PM	SiCl4 post valve closed
10/31/2012	1:40:14 PM	Bypass valve closed
10/31/2012	1:40:14 PM	Bubbler valve closed
10/31/2012	1:40:14 PM	Helium valve opened
10/31/2012	1:40:14 PM	Main Vac valve opened
10/31/2012	1:40:14 PM	Helium MFC set to  20.000000
10/31/2012	1:40:14 PM	H2 MFC set to  0.000000
10/31/2012	1:40:14 PM	BCl3 MFC set to  0.000000
10/31/2012	1:40:14 PM	PH3 MFC set to  0.000000
10/31/2012	1:40:14 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:40:14 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:40:14 PM	Tube furnace set to 200
10/31/2012	1:40:44 PM	Helium valve closed
10/31/2012	1:40:44 PM	H2 valve closed
10/31/2012	1:40:44 PM	BCl3 valve closed
10/31/2012	1:40:44 PM	PH3 valve closed
10/31/2012	1:40:44 PM	SiCl4 pre valve closed
10/31/2012	1:40:44 PM	SiCl4 post valve closed
10/31/2012	1:40:44 PM	Bypass valve closed
10/31/2012	1:40:44 PM	Bubbler valve closed
10/31/2012	1:40:44 PM	Main Vac valve opened
10/31/2012	1:40:44 PM	Helium MFC set to  0.000000
10/31/2012	1:40:44 PM	H2 MFC set to  0.000000
10/31/2012	1:40:44 PM	BCl3 MFC set to  0.000000
10/31/2012	1:40:44 PM	PH3 MFC set to  0.000000
10/31/2012	1:40:44 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:40:44 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:40:44 PM	Tube furnace set to 200
10/31/2012	1:41:14 PM	H2 valve closed
10/31/2012	1:41:14 PM	BCl3 valve closed
10/31/2012	1:41:14 PM	PH3 valve closed
10/31/2012	1:41:14 PM	SiCl4 pre valve closed
10/31/2012	1:41:14 PM	SiCl4 post valve closed
10/31/2012	1:41:14 PM	Bypass valve closed
10/31/2012	1:41:14 PM	Bubbler valve closed
10/31/2012	1:41:14 PM	Helium valve opened
10/31/2012	1:41:14 PM	Main Vac valve opened
10/31/2012	1:41:14 PM	Helium MFC set to  20.000000
10/31/2012	1:41:14 PM	H2 MFC set to  0.000000
10/31/2012	1:41:14 PM	BCl3 MFC set to  0.000000
10/31/2012	1:41:14 PM	PH3 MFC set to  0.000000
10/31/2012	1:41:14 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:41:14 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:41:14 PM	Tube furnace set to 200
10/31/2012	1:41:44 PM	Helium valve closed
10/31/2012	1:41:44 PM	H2 valve closed
10/31/2012	1:41:44 PM	BCl3 valve closed
10/31/2012	1:41:44 PM	PH3 valve closed
10/31/2012	1:41:44 PM	SiCl4 pre valve closed
10/31/2012	1:41:44 PM	SiCl4 post valve closed
10/31/2012	1:41:44 PM	Bypass valve closed
10/31/2012	1:41:44 PM	Bubbler valve closed
10/31/2012	1:41:44 PM	Main Vac valve opened
10/31/2012	1:41:44 PM	Helium MFC set to  0.000000
10/31/2012	1:41:44 PM	H2 MFC set to  0.000000
10/31/2012	1:41:44 PM	BCl3 MFC set to  0.000000
10/31/2012	1:41:44 PM	PH3 MFC set to  0.000000
10/31/2012	1:41:44 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:41:44 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:41:45 PM	Tube furnace set to 0
10/31/2012	1:41:46 PM	Run finished at 1:41 PM
10/31/2012	1:56:00 PM	Recipe started at 1:55 PM
10/31/2012	1:56:00 PM	Helium valve closed
10/31/2012	1:56:00 PM	H2 valve closed
10/31/2012	1:56:00 PM	BCl3 valve closed
10/31/2012	1:56:00 PM	PH3 valve closed
10/31/2012	1:56:00 PM	SiCl4 pre valve closed
10/31/2012	1:56:00 PM	SiCl4 post valve closed
10/31/2012	1:56:00 PM	Main Vac valve closed
10/31/2012	1:56:00 PM	Bypass valve closed
10/31/2012	1:56:00 PM	Bubbler valve closed
10/31/2012	1:56:00 PM	Helium MFC set to  0.000000
10/31/2012	1:56:00 PM	H2 MFC set to  0.000000
10/31/2012	1:56:00 PM	BCl3 MFC set to  0.000000
10/31/2012	1:56:00 PM	PH3 MFC set to  0.000000
10/31/2012	1:56:00 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:56:00 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:56:00 PM	Tube furnace set to 0
10/31/2012	1:56:03 PM	Helium valve closed
10/31/2012	1:56:03 PM	BCl3 valve closed
10/31/2012	1:56:03 PM	PH3 valve closed
10/31/2012	1:56:03 PM	SiCl4 pre valve closed
10/31/2012	1:56:03 PM	SiCl4 post valve closed
10/31/2012	1:56:03 PM	Main Vac valve closed
10/31/2012	1:56:03 PM	Bypass valve closed
10/31/2012	1:56:03 PM	Bubbler valve closed
10/31/2012	1:56:03 PM	H2 valve opened
10/31/2012	1:56:03 PM	Helium MFC set to  0.000000
10/31/2012	1:56:03 PM	H2 MFC set to  500.000000
10/31/2012	1:56:03 PM	BCl3 MFC set to  0.000000
10/31/2012	1:56:03 PM	PH3 MFC set to  0.000000
10/31/2012	1:56:03 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:56:03 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:56:03 PM	Tube furnace set to 0
10/31/2012	1:57:16 PM	Helium valve closed
10/31/2012	1:57:16 PM	BCl3 valve closed
10/31/2012	1:57:16 PM	PH3 valve closed
10/31/2012	1:57:16 PM	SiCl4 pre valve closed
10/31/2012	1:57:16 PM	SiCl4 post valve closed
10/31/2012	1:57:16 PM	Main Vac valve closed
10/31/2012	1:57:16 PM	Bypass valve closed
10/31/2012	1:57:16 PM	H2 valve opened
10/31/2012	1:57:16 PM	Bubbler valve opened
10/31/2012	1:57:16 PM	Helium MFC set to  0.000000
10/31/2012	1:57:16 PM	H2 MFC set to  500.000000
10/31/2012	1:57:16 PM	BCl3 MFC set to  0.000000
10/31/2012	1:57:16 PM	PH3 MFC set to  0.000000
10/31/2012	1:57:16 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:57:16 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:57:16 PM	Tube furnace set to 0
10/31/2012	1:57:17 PM	Helium valve closed
10/31/2012	1:57:17 PM	BCl3 valve closed
10/31/2012	1:57:17 PM	PH3 valve closed
10/31/2012	1:57:17 PM	SiCl4 pre valve closed
10/31/2012	1:57:17 PM	SiCl4 post valve closed
10/31/2012	1:57:17 PM	Main Vac valve closed
10/31/2012	1:57:17 PM	Bypass valve closed
10/31/2012	1:57:17 PM	H2 valve opened
10/31/2012	1:57:17 PM	Bubbler valve opened
10/31/2012	1:57:17 PM	Helium MFC set to  0.000000
10/31/2012	1:57:17 PM	H2 MFC set to  500.000000
10/31/2012	1:57:17 PM	BCl3 MFC set to  0.000000
10/31/2012	1:57:17 PM	PH3 MFC set to  0.000000
10/31/2012	1:57:17 PM	SiCl4 MFC set to  0.000000
10/31/2012	1:57:17 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	1:57:18 PM	Tube furnace set to 1000
10/31/2012	2:17:17 PM	Helium valve closed
10/31/2012	2:17:17 PM	BCl3 valve closed
10/31/2012	2:17:17 PM	PH3 valve closed
10/31/2012	2:17:18 PM	Main Vac valve closed
10/31/2012	2:17:18 PM	Bypass valve closed
10/31/2012	2:17:18 PM	H2 valve opened
10/31/2012	2:17:18 PM	SiCl4 pre valve opened
10/31/2012	2:17:18 PM	SiCl4 post valve opened
10/31/2012	2:17:18 PM	Bubbler valve opened
10/31/2012	2:17:18 PM	Helium MFC set to  0.000000
10/31/2012	2:17:18 PM	H2 MFC set to  450.000000
10/31/2012	2:17:18 PM	BCl3 MFC set to  0.000000
10/31/2012	2:17:18 PM	PH3 MFC set to  0.000000
10/31/2012	2:17:18 PM	SiCl4 MFC set to  50.000000
10/31/2012	2:17:18 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	2:17:18 PM	Tube furnace set to 1000
10/31/2012	2:31:18 PM	Helium valve closed
10/31/2012	2:31:18 PM	BCl3 valve closed
10/31/2012	2:31:18 PM	PH3 valve closed
10/31/2012	2:31:18 PM	SiCl4 pre valve closed
10/31/2012	2:31:18 PM	SiCl4 post valve closed
10/31/2012	2:31:18 PM	Main Vac valve closed
10/31/2012	2:31:18 PM	Bypass valve closed
10/31/2012	2:31:18 PM	H2 valve opened
10/31/2012	2:31:18 PM	Bubbler valve opened
10/31/2012	2:31:18 PM	Helium MFC set to  0.000000
10/31/2012	2:31:18 PM	H2 MFC set to  500.000000
10/31/2012	2:31:18 PM	BCl3 MFC set to  0.000000
10/31/2012	2:31:18 PM	PH3 MFC set to  0.000000
10/31/2012	2:31:18 PM	SiCl4 MFC set to  0.000000
10/31/2012	2:31:18 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	2:31:18 PM	Tube furnace set to 950
10/31/2012	2:33:18 PM	Helium valve closed
10/31/2012	2:33:18 PM	BCl3 valve closed
10/31/2012	2:33:18 PM	PH3 valve closed
10/31/2012	2:33:18 PM	SiCl4 pre valve closed
10/31/2012	2:33:18 PM	SiCl4 post valve closed
10/31/2012	2:33:18 PM	Main Vac valve closed
10/31/2012	2:33:18 PM	Bypass valve closed
10/31/2012	2:33:18 PM	H2 valve opened
10/31/2012	2:33:18 PM	Bubbler valve opened
10/31/2012	2:33:18 PM	Helium MFC set to  0.000000
10/31/2012	2:33:18 PM	H2 MFC set to  500.000000
10/31/2012	2:33:18 PM	BCl3 MFC set to  0.000000
10/31/2012	2:33:18 PM	PH3 MFC set to  0.000000
10/31/2012	2:33:18 PM	SiCl4 MFC set to  0.000000
10/31/2012	2:33:18 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	2:33:18 PM	Tube furnace set to 900
10/31/2012	2:35:18 PM	Helium valve closed
10/31/2012	2:35:18 PM	BCl3 valve closed
10/31/2012	2:35:18 PM	PH3 valve closed
10/31/2012	2:35:18 PM	SiCl4 pre valve closed
10/31/2012	2:35:18 PM	SiCl4 post valve closed
10/31/2012	2:35:18 PM	Main Vac valve closed
10/31/2012	2:35:18 PM	Bypass valve closed
10/31/2012	2:35:18 PM	H2 valve opened
10/31/2012	2:35:18 PM	Bubbler valve opened
10/31/2012	2:35:18 PM	Helium MFC set to  0.000000
10/31/2012	2:35:18 PM	H2 MFC set to  500.000000
10/31/2012	2:35:18 PM	BCl3 MFC set to  0.000000
10/31/2012	2:35:18 PM	PH3 MFC set to  0.000000
10/31/2012	2:35:18 PM	SiCl4 MFC set to  0.000000
10/31/2012	2:35:18 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	2:35:18 PM	Tube furnace set to 850
10/31/2012	2:37:18 PM	H2 valve closed
10/31/2012	2:37:18 PM	BCl3 valve closed
10/31/2012	2:37:18 PM	PH3 valve closed
10/31/2012	2:37:18 PM	SiCl4 pre valve closed
10/31/2012	2:37:18 PM	SiCl4 post valve closed
10/31/2012	2:37:18 PM	Main Vac valve closed
10/31/2012	2:37:18 PM	Bypass valve closed
10/31/2012	2:37:18 PM	Helium valve opened
10/31/2012	2:37:18 PM	Bubbler valve opened
10/31/2012	2:37:18 PM	Helium MFC set to  500.000000
10/31/2012	2:37:18 PM	H2 MFC set to  0.000000
10/31/2012	2:37:18 PM	BCl3 MFC set to  0.000000
10/31/2012	2:37:19 PM	PH3 MFC set to  0.000000
10/31/2012	2:37:19 PM	SiCl4 MFC set to  0.000000
10/31/2012	2:37:19 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	2:37:19 PM	Tube furnace set to 800
10/31/2012	2:39:19 PM	H2 valve closed
10/31/2012	2:39:19 PM	BCl3 valve closed
10/31/2012	2:39:19 PM	PH3 valve closed
10/31/2012	2:39:19 PM	SiCl4 pre valve closed
10/31/2012	2:39:19 PM	SiCl4 post valve closed
10/31/2012	2:39:19 PM	Main Vac valve closed
10/31/2012	2:39:19 PM	Bypass valve closed
10/31/2012	2:39:19 PM	Helium valve opened
10/31/2012	2:39:19 PM	Bubbler valve opened
10/31/2012	2:39:19 PM	Helium MFC set to  500.000000
10/31/2012	2:39:19 PM	H2 MFC set to  0.000000
10/31/2012	2:39:19 PM	BCl3 MFC set to  0.000000
10/31/2012	2:39:19 PM	PH3 MFC set to  0.000000
10/31/2012	2:39:19 PM	SiCl4 MFC set to  0.000000
10/31/2012	2:39:19 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	2:39:19 PM	Tube furnace set to 750
10/31/2012	2:41:19 PM	H2 valve closed
10/31/2012	2:41:19 PM	BCl3 valve closed
10/31/2012	2:41:19 PM	PH3 valve closed
10/31/2012	2:41:19 PM	SiCl4 pre valve closed
10/31/2012	2:41:19 PM	SiCl4 post valve closed
10/31/2012	2:41:19 PM	Main Vac valve closed
10/31/2012	2:41:19 PM	Bypass valve closed
10/31/2012	2:41:19 PM	Helium valve opened
10/31/2012	2:41:19 PM	Bubbler valve opened
10/31/2012	2:41:19 PM	Helium MFC set to  500.000000
10/31/2012	2:41:19 PM	H2 MFC set to  0.000000
10/31/2012	2:41:19 PM	BCl3 MFC set to  0.000000
10/31/2012	2:41:19 PM	PH3 MFC set to  0.000000
10/31/2012	2:41:19 PM	SiCl4 MFC set to  0.000000
10/31/2012	2:41:19 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	2:41:19 PM	Tube furnace set to 0
10/31/2012	3:01:19 PM	Helium valve closed
10/31/2012	3:01:19 PM	H2 valve closed
10/31/2012	3:01:19 PM	BCl3 valve closed
10/31/2012	3:01:19 PM	PH3 valve closed
10/31/2012	3:01:19 PM	SiCl4 pre valve closed
10/31/2012	3:01:19 PM	SiCl4 post valve closed
10/31/2012	3:01:19 PM	Main Vac valve closed
10/31/2012	3:01:19 PM	Bypass valve closed
10/31/2012	3:01:19 PM	Bubbler valve closed
10/31/2012	3:01:19 PM	Helium MFC set to  0.000000
10/31/2012	3:01:19 PM	H2 MFC set to  0.000000
10/31/2012	3:01:19 PM	BCl3 MFC set to  0.000000
10/31/2012	3:01:19 PM	PH3 MFC set to  0.000000
10/31/2012	3:01:19 PM	SiCl4 MFC set to  0.000000
10/31/2012	3:01:19 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	3:01:19 PM	Tube furnace set to 0
10/31/2012	3:01:21 PM	Helium valve closed
10/31/2012	3:01:21 PM	H2 valve closed
10/31/2012	3:01:21 PM	BCl3 valve closed
10/31/2012	3:01:21 PM	PH3 valve closed
10/31/2012	3:01:21 PM	SiCl4 pre valve closed
10/31/2012	3:01:21 PM	SiCl4 post valve closed
10/31/2012	3:01:21 PM	Main Vac valve closed
10/31/2012	3:01:21 PM	Bubbler valve closed
10/31/2012	3:01:21 PM	Bypass valve opened
10/31/2012	3:01:21 PM	Helium MFC set to  0.000000
10/31/2012	3:01:21 PM	H2 MFC set to  0.000000
10/31/2012	3:01:21 PM	BCl3 MFC set to  0.000000
10/31/2012	3:01:21 PM	PH3 MFC set to  0.000000
10/31/2012	3:01:21 PM	SiCl4 MFC set to  0.000000
10/31/2012	3:01:21 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	3:01:21 PM	Tube furnace set to 0
10/31/2012	3:02:18 PM	Helium valve closed
10/31/2012	3:02:18 PM	H2 valve closed
10/31/2012	3:02:18 PM	BCl3 valve closed
10/31/2012	3:02:18 PM	PH3 valve closed
10/31/2012	3:02:18 PM	SiCl4 pre valve closed
10/31/2012	3:02:18 PM	SiCl4 post valve closed
10/31/2012	3:02:18 PM	Main Vac valve closed
10/31/2012	3:02:18 PM	Bubbler valve closed
10/31/2012	3:02:18 PM	Bypass valve opened
10/31/2012	3:02:18 PM	Helium MFC set to  0.000000
10/31/2012	3:02:18 PM	H2 MFC set to  0.000000
10/31/2012	3:02:18 PM	BCl3 MFC set to  0.000000
10/31/2012	3:02:18 PM	PH3 MFC set to  0.000000
10/31/2012	3:02:18 PM	SiCl4 MFC set to  0.000000
10/31/2012	3:02:18 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	3:02:18 PM	Tube furnace set to 0
10/31/2012	3:03:18 PM	Helium valve closed
10/31/2012	3:03:18 PM	H2 valve closed
10/31/2012	3:03:18 PM	BCl3 valve closed
10/31/2012	3:03:18 PM	PH3 valve closed
10/31/2012	3:03:18 PM	SiCl4 pre valve closed
10/31/2012	3:03:18 PM	SiCl4 post valve closed
10/31/2012	3:03:18 PM	Bypass valve closed
10/31/2012	3:03:18 PM	Bubbler valve closed
10/31/2012	3:03:18 PM	Main Vac valve opened
10/31/2012	3:03:18 PM	Helium MFC set to  0.000000
10/31/2012	3:03:18 PM	H2 MFC set to  0.000000
10/31/2012	3:03:18 PM	BCl3 MFC set to  0.000000
10/31/2012	3:03:18 PM	PH3 MFC set to  0.000000
10/31/2012	3:03:18 PM	SiCl4 MFC set to  0.000000
10/31/2012	3:03:18 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	3:03:18 PM	Tube furnace set to 0
10/31/2012	3:03:19 PM	Run finished at 3:03 PM
10/31/2012	3:41:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2012	3:41:19 PM	Recipe started at 3:41 PM
10/31/2012	3:41:19 PM	Helium valve closed
10/31/2012	3:41:19 PM	H2 valve closed
10/31/2012	3:41:19 PM	BCl3 valve closed
10/31/2012	3:41:19 PM	PH3 valve closed
10/31/2012	3:41:19 PM	SiCl4 pre valve closed
10/31/2012	3:41:19 PM	SiCl4 post valve closed
10/31/2012	3:41:19 PM	Main Vac valve closed
10/31/2012	3:41:19 PM	Bypass valve closed
10/31/2012	3:41:19 PM	Bubbler valve closed
10/31/2012	3:41:19 PM	Helium MFC set to  0.000000
10/31/2012	3:41:19 PM	H2 MFC set to  0.000000
10/31/2012	3:41:19 PM	BCl3 MFC set to  0.000000
10/31/2012	3:41:19 PM	PH3 MFC set to  0.000000
10/31/2012	3:41:19 PM	SiCl4 MFC set to  0.000000
10/31/2012	3:41:19 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	3:41:19 PM	Tube furnace set to 0
10/31/2012	3:41:23 PM	H2 valve closed
10/31/2012	3:41:23 PM	BCl3 valve closed
10/31/2012	3:41:23 PM	PH3 valve closed
10/31/2012	3:41:23 PM	SiCl4 pre valve closed
10/31/2012	3:41:23 PM	SiCl4 post valve closed
10/31/2012	3:41:23 PM	Main Vac valve closed
10/31/2012	3:41:23 PM	Bypass valve closed
10/31/2012	3:41:23 PM	Bubbler valve closed
10/31/2012	3:41:23 PM	Helium valve opened
10/31/2012	3:41:23 PM	Helium MFC set to  500.000000
10/31/2012	3:41:23 PM	H2 MFC set to  0.000000
10/31/2012	3:41:23 PM	BCl3 MFC set to  0.000000
10/31/2012	3:41:23 PM	PH3 MFC set to  0.000000
10/31/2012	3:41:23 PM	SiCl4 MFC set to  0.000000
10/31/2012	3:41:23 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	3:41:23 PM	Tube furnace set to 0
10/31/2012	3:42:35 PM	Helium valve closed
10/31/2012	3:42:35 PM	H2 valve closed
10/31/2012	3:42:35 PM	BCl3 valve closed
10/31/2012	3:42:35 PM	PH3 valve closed
10/31/2012	3:42:35 PM	SiCl4 pre valve closed
10/31/2012	3:42:35 PM	SiCl4 post valve closed
10/31/2012	3:42:35 PM	Main Vac valve closed
10/31/2012	3:42:35 PM	Bypass valve closed
10/31/2012	3:42:35 PM	Bubbler valve closed
10/31/2012	3:42:35 PM	Helium MFC set to  0.000000
10/31/2012	3:42:35 PM	H2 MFC set to  0.000000
10/31/2012	3:42:35 PM	BCl3 MFC set to  0.000000
10/31/2012	3:42:35 PM	PH3 MFC set to  0.000000
10/31/2012	3:42:35 PM	SiCl4 MFC set to  0.000000
10/31/2012	3:42:35 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	3:42:35 PM	Tube furnace set to 0
10/31/2012	3:42:36 PM	Run finished at 3:42 PM
10/31/2012	3:42:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2012	3:45:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/31/2012	3:45:45 PM	Recipe started at 3:45 PM
10/31/2012	3:45:45 PM	Helium valve closed
10/31/2012	3:45:45 PM	H2 valve closed
10/31/2012	3:45:45 PM	BCl3 valve closed
10/31/2012	3:45:45 PM	PH3 valve closed
10/31/2012	3:45:45 PM	SiCl4 pre valve closed
10/31/2012	3:45:45 PM	SiCl4 post valve closed
10/31/2012	3:45:45 PM	Main Vac valve closed
10/31/2012	3:45:45 PM	Bubbler valve closed
10/31/2012	3:45:45 PM	Bypass valve opened
10/31/2012	3:45:45 PM	Helium MFC set to  0.000000
10/31/2012	3:45:45 PM	H2 MFC set to  0.000000
10/31/2012	3:45:45 PM	BCl3 MFC set to  0.000000
10/31/2012	3:45:45 PM	PH3 MFC set to  0.000000
10/31/2012	3:45:45 PM	SiCl4 MFC set to  0.000000
10/31/2012	3:45:45 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	3:45:45 PM	Tube furnace set to 0
10/31/2012	3:46:59 PM	Helium valve closed
10/31/2012	3:46:59 PM	H2 valve closed
10/31/2012	3:46:59 PM	BCl3 valve closed
10/31/2012	3:46:59 PM	PH3 valve closed
10/31/2012	3:46:59 PM	SiCl4 pre valve closed
10/31/2012	3:46:59 PM	SiCl4 post valve closed
10/31/2012	3:46:59 PM	Main Vac valve closed
10/31/2012	3:46:59 PM	Bubbler valve closed
10/31/2012	3:46:59 PM	Bypass valve opened
10/31/2012	3:46:59 PM	Helium MFC set to  0.000000
10/31/2012	3:46:59 PM	H2 MFC set to  0.000000
10/31/2012	3:46:59 PM	BCl3 MFC set to  0.000000
10/31/2012	3:46:59 PM	PH3 MFC set to  0.000000
10/31/2012	3:46:59 PM	SiCl4 MFC set to  0.000000
10/31/2012	3:46:59 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	3:46:59 PM	Tube furnace set to 0
10/31/2012	3:47:59 PM	Helium valve closed
10/31/2012	3:47:59 PM	H2 valve closed
10/31/2012	3:47:59 PM	BCl3 valve closed
10/31/2012	3:47:59 PM	PH3 valve closed
10/31/2012	3:47:59 PM	SiCl4 pre valve closed
10/31/2012	3:47:59 PM	SiCl4 post valve closed
10/31/2012	3:47:59 PM	Bypass valve closed
10/31/2012	3:47:59 PM	Bubbler valve closed
10/31/2012	3:47:59 PM	Main Vac valve opened
10/31/2012	3:47:59 PM	Helium MFC set to  0.000000
10/31/2012	3:47:59 PM	H2 MFC set to  0.000000
10/31/2012	3:47:59 PM	BCl3 MFC set to  0.000000
10/31/2012	3:47:59 PM	PH3 MFC set to  0.000000
10/31/2012	3:47:59 PM	SiCl4 MFC set to  0.000000
10/31/2012	3:47:59 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	3:47:59 PM	Tube furnace set to 0
10/31/2012	3:48:00 PM	Run finished at 3:48 PM
10/31/2012	3:48:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/31/2012	3:58:30 PM	Recipe started at 3:58 PM
10/31/2012	3:58:30 PM	Helium valve closed
10/31/2012	3:58:30 PM	H2 valve closed
10/31/2012	3:58:30 PM	BCl3 valve closed
10/31/2012	3:58:30 PM	PH3 valve closed
10/31/2012	3:58:30 PM	SiCl4 pre valve closed
10/31/2012	3:58:30 PM	SiCl4 post valve closed
10/31/2012	3:58:30 PM	Bypass valve closed
10/31/2012	3:58:30 PM	Bubbler valve closed
10/31/2012	3:58:30 PM	Main Vac valve opened
10/31/2012	3:58:30 PM	Helium MFC set to  0.000000
10/31/2012	3:58:30 PM	H2 MFC set to  0.000000
10/31/2012	3:58:30 PM	BCl3 MFC set to  0.000000
10/31/2012	3:58:30 PM	PH3 MFC set to  0.000000
10/31/2012	3:58:30 PM	SiCl4 MFC set to  0.000000
10/31/2012	3:58:30 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	3:58:31 PM	Tube furnace set to 0
10/31/2012	3:59:01 PM	H2 valve closed
10/31/2012	3:59:01 PM	BCl3 valve closed
10/31/2012	3:59:01 PM	PH3 valve closed
10/31/2012	3:59:01 PM	SiCl4 pre valve closed
10/31/2012	3:59:01 PM	SiCl4 post valve closed
10/31/2012	3:59:01 PM	Bypass valve closed
10/31/2012	3:59:01 PM	Bubbler valve closed
10/31/2012	3:59:01 PM	Helium valve opened
10/31/2012	3:59:01 PM	Main Vac valve opened
10/31/2012	3:59:01 PM	Helium MFC set to  20.000000
10/31/2012	3:59:01 PM	H2 MFC set to  0.000000
10/31/2012	3:59:01 PM	BCl3 MFC set to  0.000000
10/31/2012	3:59:01 PM	PH3 MFC set to  0.000000
10/31/2012	3:59:01 PM	SiCl4 MFC set to  0.000000
10/31/2012	3:59:01 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	3:59:01 PM	Tube furnace set to 0
10/31/2012	3:59:31 PM	Helium valve closed
10/31/2012	3:59:31 PM	H2 valve closed
10/31/2012	3:59:31 PM	BCl3 valve closed
10/31/2012	3:59:31 PM	PH3 valve closed
10/31/2012	3:59:31 PM	SiCl4 pre valve closed
10/31/2012	3:59:31 PM	SiCl4 post valve closed
10/31/2012	3:59:31 PM	Bypass valve closed
10/31/2012	3:59:31 PM	Bubbler valve closed
10/31/2012	3:59:31 PM	Main Vac valve opened
10/31/2012	3:59:31 PM	Helium MFC set to  0.000000
10/31/2012	3:59:31 PM	H2 MFC set to  0.000000
10/31/2012	3:59:31 PM	BCl3 MFC set to  0.000000
10/31/2012	3:59:31 PM	PH3 MFC set to  0.000000
10/31/2012	3:59:31 PM	SiCl4 MFC set to  0.000000
10/31/2012	3:59:31 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	3:59:31 PM	Tube furnace set to 0
10/31/2012	4:00:01 PM	H2 valve closed
10/31/2012	4:00:01 PM	BCl3 valve closed
10/31/2012	4:00:01 PM	PH3 valve closed
10/31/2012	4:00:01 PM	SiCl4 pre valve closed
10/31/2012	4:00:01 PM	SiCl4 post valve closed
10/31/2012	4:00:01 PM	Bypass valve closed
10/31/2012	4:00:01 PM	Bubbler valve closed
10/31/2012	4:00:01 PM	Helium valve opened
10/31/2012	4:00:01 PM	Main Vac valve opened
10/31/2012	4:00:01 PM	Helium MFC set to  20.000000
10/31/2012	4:00:01 PM	H2 MFC set to  0.000000
10/31/2012	4:00:01 PM	BCl3 MFC set to  0.000000
10/31/2012	4:00:01 PM	PH3 MFC set to  0.000000
10/31/2012	4:00:01 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:00:01 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:00:01 PM	Tube furnace set to 0
10/31/2012	4:00:31 PM	Helium valve closed
10/31/2012	4:00:31 PM	H2 valve closed
10/31/2012	4:00:31 PM	BCl3 valve closed
10/31/2012	4:00:31 PM	PH3 valve closed
10/31/2012	4:00:31 PM	SiCl4 pre valve closed
10/31/2012	4:00:31 PM	SiCl4 post valve closed
10/31/2012	4:00:31 PM	Bypass valve closed
10/31/2012	4:00:31 PM	Bubbler valve closed
10/31/2012	4:00:31 PM	Main Vac valve opened
10/31/2012	4:00:31 PM	Helium MFC set to  0.000000
10/31/2012	4:00:31 PM	H2 MFC set to  0.000000
10/31/2012	4:00:31 PM	BCl3 MFC set to  0.000000
10/31/2012	4:00:31 PM	PH3 MFC set to  0.000000
10/31/2012	4:00:31 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:00:31 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:00:32 PM	Tube furnace set to 0
10/31/2012	4:01:02 PM	H2 valve closed
10/31/2012	4:01:02 PM	BCl3 valve closed
10/31/2012	4:01:02 PM	PH3 valve closed
10/31/2012	4:01:02 PM	SiCl4 pre valve closed
10/31/2012	4:01:02 PM	SiCl4 post valve closed
10/31/2012	4:01:02 PM	Bypass valve closed
10/31/2012	4:01:02 PM	Bubbler valve closed
10/31/2012	4:01:02 PM	Helium valve opened
10/31/2012	4:01:02 PM	Main Vac valve opened
10/31/2012	4:01:02 PM	Helium MFC set to  20.000000
10/31/2012	4:01:02 PM	H2 MFC set to  0.000000
10/31/2012	4:01:02 PM	BCl3 MFC set to  0.000000
10/31/2012	4:01:02 PM	PH3 MFC set to  0.000000
10/31/2012	4:01:02 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:01:02 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:01:02 PM	Tube furnace set to 0
10/31/2012	4:01:32 PM	Helium valve closed
10/31/2012	4:01:32 PM	H2 valve closed
10/31/2012	4:01:32 PM	BCl3 valve closed
10/31/2012	4:01:32 PM	PH3 valve closed
10/31/2012	4:01:32 PM	SiCl4 pre valve closed
10/31/2012	4:01:32 PM	SiCl4 post valve closed
10/31/2012	4:01:32 PM	Bypass valve closed
10/31/2012	4:01:32 PM	Bubbler valve closed
10/31/2012	4:01:32 PM	Main Vac valve opened
10/31/2012	4:01:32 PM	Helium MFC set to  0.000000
10/31/2012	4:01:32 PM	H2 MFC set to  0.000000
10/31/2012	4:01:32 PM	BCl3 MFC set to  0.000000
10/31/2012	4:01:32 PM	PH3 MFC set to  0.000000
10/31/2012	4:01:32 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:01:32 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:01:32 PM	Tube furnace set to 0
10/31/2012	4:02:02 PM	H2 valve closed
10/31/2012	4:02:02 PM	BCl3 valve closed
10/31/2012	4:02:02 PM	PH3 valve closed
10/31/2012	4:02:02 PM	SiCl4 pre valve closed
10/31/2012	4:02:02 PM	SiCl4 post valve closed
10/31/2012	4:02:02 PM	Bypass valve closed
10/31/2012	4:02:02 PM	Bubbler valve closed
10/31/2012	4:02:02 PM	Helium valve opened
10/31/2012	4:02:02 PM	Main Vac valve opened
10/31/2012	4:02:02 PM	Helium MFC set to  20.000000
10/31/2012	4:02:02 PM	H2 MFC set to  0.000000
10/31/2012	4:02:02 PM	BCl3 MFC set to  0.000000
10/31/2012	4:02:02 PM	PH3 MFC set to  0.000000
10/31/2012	4:02:02 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:02:02 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:02:02 PM	Tube furnace set to 0
10/31/2012	4:02:32 PM	Helium valve closed
10/31/2012	4:02:32 PM	H2 valve closed
10/31/2012	4:02:32 PM	BCl3 valve closed
10/31/2012	4:02:32 PM	PH3 valve closed
10/31/2012	4:02:32 PM	SiCl4 pre valve closed
10/31/2012	4:02:32 PM	SiCl4 post valve closed
10/31/2012	4:02:32 PM	Bypass valve closed
10/31/2012	4:02:32 PM	Bubbler valve closed
10/31/2012	4:02:32 PM	Main Vac valve opened
10/31/2012	4:02:32 PM	Helium MFC set to  0.000000
10/31/2012	4:02:32 PM	H2 MFC set to  0.000000
10/31/2012	4:02:32 PM	BCl3 MFC set to  0.000000
10/31/2012	4:02:32 PM	PH3 MFC set to  0.000000
10/31/2012	4:02:32 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:02:32 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:02:33 PM	Tube furnace set to 0
10/31/2012	4:03:03 PM	H2 valve closed
10/31/2012	4:03:03 PM	BCl3 valve closed
10/31/2012	4:03:03 PM	PH3 valve closed
10/31/2012	4:03:03 PM	SiCl4 pre valve closed
10/31/2012	4:03:03 PM	SiCl4 post valve closed
10/31/2012	4:03:03 PM	Bypass valve closed
10/31/2012	4:03:03 PM	Bubbler valve closed
10/31/2012	4:03:03 PM	Helium valve opened
10/31/2012	4:03:03 PM	Main Vac valve opened
10/31/2012	4:03:03 PM	Helium MFC set to  20.000000
10/31/2012	4:03:03 PM	H2 MFC set to  0.000000
10/31/2012	4:03:03 PM	BCl3 MFC set to  0.000000
10/31/2012	4:03:03 PM	PH3 MFC set to  0.000000
10/31/2012	4:03:03 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:03:03 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:03:03 PM	Tube furnace set to 0
10/31/2012	4:03:33 PM	Helium valve closed
10/31/2012	4:03:33 PM	H2 valve closed
10/31/2012	4:03:33 PM	BCl3 valve closed
10/31/2012	4:03:33 PM	PH3 valve closed
10/31/2012	4:03:33 PM	SiCl4 pre valve closed
10/31/2012	4:03:33 PM	SiCl4 post valve closed
10/31/2012	4:03:33 PM	Bypass valve closed
10/31/2012	4:03:33 PM	Bubbler valve closed
10/31/2012	4:03:33 PM	Main Vac valve opened
10/31/2012	4:03:33 PM	Helium MFC set to  0.000000
10/31/2012	4:03:33 PM	H2 MFC set to  0.000000
10/31/2012	4:03:33 PM	BCl3 MFC set to  0.000000
10/31/2012	4:03:33 PM	PH3 MFC set to  0.000000
10/31/2012	4:03:33 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:03:33 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:03:33 PM	Tube furnace set to 0
10/31/2012	4:04:03 PM	H2 valve closed
10/31/2012	4:04:03 PM	BCl3 valve closed
10/31/2012	4:04:03 PM	PH3 valve closed
10/31/2012	4:04:03 PM	SiCl4 pre valve closed
10/31/2012	4:04:03 PM	SiCl4 post valve closed
10/31/2012	4:04:03 PM	Bypass valve closed
10/31/2012	4:04:03 PM	Bubbler valve closed
10/31/2012	4:04:03 PM	Helium valve opened
10/31/2012	4:04:03 PM	Main Vac valve opened
10/31/2012	4:04:03 PM	Helium MFC set to  20.000000
10/31/2012	4:04:03 PM	H2 MFC set to  0.000000
10/31/2012	4:04:03 PM	BCl3 MFC set to  0.000000
10/31/2012	4:04:03 PM	PH3 MFC set to  0.000000
10/31/2012	4:04:03 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:04:03 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:04:03 PM	Tube furnace set to 0
10/31/2012	4:04:33 PM	Helium valve closed
10/31/2012	4:04:33 PM	H2 valve closed
10/31/2012	4:04:33 PM	BCl3 valve closed
10/31/2012	4:04:33 PM	PH3 valve closed
10/31/2012	4:04:33 PM	SiCl4 pre valve closed
10/31/2012	4:04:33 PM	SiCl4 post valve closed
10/31/2012	4:04:33 PM	Bypass valve closed
10/31/2012	4:04:33 PM	Bubbler valve closed
10/31/2012	4:04:33 PM	Main Vac valve opened
10/31/2012	4:04:33 PM	Helium MFC set to  0.000000
10/31/2012	4:04:33 PM	H2 MFC set to  0.000000
10/31/2012	4:04:33 PM	BCl3 MFC set to  0.000000
10/31/2012	4:04:33 PM	PH3 MFC set to  0.000000
10/31/2012	4:04:33 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:04:33 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:04:34 PM	Tube furnace set to 0
10/31/2012	4:05:04 PM	H2 valve closed
10/31/2012	4:05:04 PM	BCl3 valve closed
10/31/2012	4:05:04 PM	PH3 valve closed
10/31/2012	4:05:04 PM	SiCl4 pre valve closed
10/31/2012	4:05:04 PM	SiCl4 post valve closed
10/31/2012	4:05:04 PM	Bypass valve closed
10/31/2012	4:05:04 PM	Bubbler valve closed
10/31/2012	4:05:04 PM	Helium valve opened
10/31/2012	4:05:04 PM	Main Vac valve opened
10/31/2012	4:05:04 PM	Helium MFC set to  20.000000
10/31/2012	4:05:04 PM	H2 MFC set to  0.000000
10/31/2012	4:05:04 PM	BCl3 MFC set to  0.000000
10/31/2012	4:05:04 PM	PH3 MFC set to  0.000000
10/31/2012	4:05:04 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:05:04 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:05:04 PM	Tube furnace set to 0
10/31/2012	4:05:34 PM	Helium valve closed
10/31/2012	4:05:34 PM	H2 valve closed
10/31/2012	4:05:34 PM	BCl3 valve closed
10/31/2012	4:05:34 PM	PH3 valve closed
10/31/2012	4:05:34 PM	SiCl4 pre valve closed
10/31/2012	4:05:34 PM	SiCl4 post valve closed
10/31/2012	4:05:34 PM	Bypass valve closed
10/31/2012	4:05:34 PM	Bubbler valve closed
10/31/2012	4:05:34 PM	Main Vac valve opened
10/31/2012	4:05:34 PM	Helium MFC set to  0.000000
10/31/2012	4:05:34 PM	H2 MFC set to  0.000000
10/31/2012	4:05:34 PM	BCl3 MFC set to  0.000000
10/31/2012	4:05:34 PM	PH3 MFC set to  0.000000
10/31/2012	4:05:34 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:05:34 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:05:34 PM	Tube furnace set to 0
10/31/2012	4:06:04 PM	H2 valve closed
10/31/2012	4:06:04 PM	BCl3 valve closed
10/31/2012	4:06:04 PM	PH3 valve closed
10/31/2012	4:06:04 PM	SiCl4 pre valve closed
10/31/2012	4:06:04 PM	SiCl4 post valve closed
10/31/2012	4:06:04 PM	Bypass valve closed
10/31/2012	4:06:04 PM	Bubbler valve closed
10/31/2012	4:06:04 PM	Helium valve opened
10/31/2012	4:06:04 PM	Main Vac valve opened
10/31/2012	4:06:04 PM	Helium MFC set to  20.000000
10/31/2012	4:06:04 PM	H2 MFC set to  0.000000
10/31/2012	4:06:04 PM	BCl3 MFC set to  0.000000
10/31/2012	4:06:04 PM	PH3 MFC set to  0.000000
10/31/2012	4:06:04 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:06:04 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:06:04 PM	Tube furnace set to 0
10/31/2012	4:06:34 PM	Helium valve closed
10/31/2012	4:06:34 PM	H2 valve closed
10/31/2012	4:06:34 PM	BCl3 valve closed
10/31/2012	4:06:34 PM	PH3 valve closed
10/31/2012	4:06:34 PM	SiCl4 pre valve closed
10/31/2012	4:06:34 PM	SiCl4 post valve closed
10/31/2012	4:06:34 PM	Bypass valve closed
10/31/2012	4:06:34 PM	Bubbler valve closed
10/31/2012	4:06:34 PM	Main Vac valve opened
10/31/2012	4:06:34 PM	Helium MFC set to  0.000000
10/31/2012	4:06:34 PM	H2 MFC set to  0.000000
10/31/2012	4:06:34 PM	BCl3 MFC set to  0.000000
10/31/2012	4:06:34 PM	PH3 MFC set to  0.000000
10/31/2012	4:06:34 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:06:34 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:06:35 PM	Tube furnace set to 0
10/31/2012	4:07:05 PM	H2 valve closed
10/31/2012	4:07:05 PM	BCl3 valve closed
10/31/2012	4:07:05 PM	PH3 valve closed
10/31/2012	4:07:05 PM	SiCl4 pre valve closed
10/31/2012	4:07:05 PM	SiCl4 post valve closed
10/31/2012	4:07:05 PM	Bypass valve closed
10/31/2012	4:07:05 PM	Bubbler valve closed
10/31/2012	4:07:05 PM	Helium valve opened
10/31/2012	4:07:05 PM	Main Vac valve opened
10/31/2012	4:07:05 PM	Helium MFC set to  20.000000
10/31/2012	4:07:05 PM	H2 MFC set to  0.000000
10/31/2012	4:07:05 PM	BCl3 MFC set to  0.000000
10/31/2012	4:07:05 PM	PH3 MFC set to  0.000000
10/31/2012	4:07:05 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:07:05 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:07:05 PM	Tube furnace set to 0
10/31/2012	4:07:35 PM	Helium valve closed
10/31/2012	4:07:35 PM	H2 valve closed
10/31/2012	4:07:35 PM	BCl3 valve closed
10/31/2012	4:07:35 PM	PH3 valve closed
10/31/2012	4:07:35 PM	SiCl4 pre valve closed
10/31/2012	4:07:35 PM	SiCl4 post valve closed
10/31/2012	4:07:35 PM	Bypass valve closed
10/31/2012	4:07:35 PM	Bubbler valve closed
10/31/2012	4:07:35 PM	Main Vac valve opened
10/31/2012	4:07:35 PM	Helium MFC set to  0.000000
10/31/2012	4:07:35 PM	H2 MFC set to  0.000000
10/31/2012	4:07:35 PM	BCl3 MFC set to  0.000000
10/31/2012	4:07:35 PM	PH3 MFC set to  0.000000
10/31/2012	4:07:35 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:07:35 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:07:35 PM	Tube furnace set to 200
10/31/2012	4:08:05 PM	H2 valve closed
10/31/2012	4:08:05 PM	BCl3 valve closed
10/31/2012	4:08:05 PM	PH3 valve closed
10/31/2012	4:08:05 PM	SiCl4 pre valve closed
10/31/2012	4:08:05 PM	SiCl4 post valve closed
10/31/2012	4:08:05 PM	Bypass valve closed
10/31/2012	4:08:05 PM	Bubbler valve closed
10/31/2012	4:08:05 PM	Helium valve opened
10/31/2012	4:08:05 PM	Main Vac valve opened
10/31/2012	4:08:05 PM	Helium MFC set to  20.000000
10/31/2012	4:08:05 PM	H2 MFC set to  0.000000
10/31/2012	4:08:05 PM	BCl3 MFC set to  0.000000
10/31/2012	4:08:05 PM	PH3 MFC set to  0.000000
10/31/2012	4:08:05 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:08:05 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:08:05 PM	Tube furnace set to 200
10/31/2012	4:08:35 PM	Helium valve closed
10/31/2012	4:08:35 PM	H2 valve closed
10/31/2012	4:08:35 PM	BCl3 valve closed
10/31/2012	4:08:35 PM	PH3 valve closed
10/31/2012	4:08:35 PM	SiCl4 pre valve closed
10/31/2012	4:08:35 PM	SiCl4 post valve closed
10/31/2012	4:08:35 PM	Bypass valve closed
10/31/2012	4:08:35 PM	Bubbler valve closed
10/31/2012	4:08:35 PM	Main Vac valve opened
10/31/2012	4:08:35 PM	Helium MFC set to  0.000000
10/31/2012	4:08:35 PM	H2 MFC set to  0.000000
10/31/2012	4:08:35 PM	BCl3 MFC set to  0.000000
10/31/2012	4:08:35 PM	PH3 MFC set to  0.000000
10/31/2012	4:08:35 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:08:35 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:08:36 PM	Tube furnace set to 200
10/31/2012	4:09:06 PM	H2 valve closed
10/31/2012	4:09:06 PM	BCl3 valve closed
10/31/2012	4:09:06 PM	PH3 valve closed
10/31/2012	4:09:06 PM	SiCl4 pre valve closed
10/31/2012	4:09:06 PM	SiCl4 post valve closed
10/31/2012	4:09:06 PM	Bypass valve closed
10/31/2012	4:09:06 PM	Bubbler valve closed
10/31/2012	4:09:06 PM	Helium valve opened
10/31/2012	4:09:06 PM	Main Vac valve opened
10/31/2012	4:09:06 PM	Helium MFC set to  20.000000
10/31/2012	4:09:06 PM	H2 MFC set to  0.000000
10/31/2012	4:09:06 PM	BCl3 MFC set to  0.000000
10/31/2012	4:09:06 PM	PH3 MFC set to  0.000000
10/31/2012	4:09:06 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:09:06 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:09:06 PM	Tube furnace set to 200
10/31/2012	4:09:36 PM	Helium valve closed
10/31/2012	4:09:36 PM	H2 valve closed
10/31/2012	4:09:36 PM	BCl3 valve closed
10/31/2012	4:09:36 PM	PH3 valve closed
10/31/2012	4:09:36 PM	SiCl4 pre valve closed
10/31/2012	4:09:36 PM	SiCl4 post valve closed
10/31/2012	4:09:36 PM	Bypass valve closed
10/31/2012	4:09:36 PM	Bubbler valve closed
10/31/2012	4:09:36 PM	Main Vac valve opened
10/31/2012	4:09:36 PM	Helium MFC set to  0.000000
10/31/2012	4:09:36 PM	H2 MFC set to  0.000000
10/31/2012	4:09:36 PM	BCl3 MFC set to  0.000000
10/31/2012	4:09:36 PM	PH3 MFC set to  0.000000
10/31/2012	4:09:36 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:09:36 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:09:36 PM	Tube furnace set to 200
10/31/2012	4:10:06 PM	H2 valve closed
10/31/2012	4:10:06 PM	BCl3 valve closed
10/31/2012	4:10:06 PM	PH3 valve closed
10/31/2012	4:10:06 PM	SiCl4 pre valve closed
10/31/2012	4:10:06 PM	SiCl4 post valve closed
10/31/2012	4:10:06 PM	Bypass valve closed
10/31/2012	4:10:06 PM	Bubbler valve closed
10/31/2012	4:10:06 PM	Helium valve opened
10/31/2012	4:10:06 PM	Main Vac valve opened
10/31/2012	4:10:06 PM	Helium MFC set to  20.000000
10/31/2012	4:10:06 PM	H2 MFC set to  0.000000
10/31/2012	4:10:06 PM	BCl3 MFC set to  0.000000
10/31/2012	4:10:06 PM	PH3 MFC set to  0.000000
10/31/2012	4:10:06 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:10:06 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:10:06 PM	Tube furnace set to 200
10/31/2012	4:10:36 PM	Helium valve closed
10/31/2012	4:10:36 PM	H2 valve closed
10/31/2012	4:10:36 PM	BCl3 valve closed
10/31/2012	4:10:36 PM	PH3 valve closed
10/31/2012	4:10:36 PM	SiCl4 pre valve closed
10/31/2012	4:10:36 PM	SiCl4 post valve closed
10/31/2012	4:10:36 PM	Bypass valve closed
10/31/2012	4:10:36 PM	Bubbler valve closed
10/31/2012	4:10:36 PM	Main Vac valve opened
10/31/2012	4:10:36 PM	Helium MFC set to  0.000000
10/31/2012	4:10:36 PM	H2 MFC set to  0.000000
10/31/2012	4:10:36 PM	BCl3 MFC set to  0.000000
10/31/2012	4:10:36 PM	PH3 MFC set to  0.000000
10/31/2012	4:10:36 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:10:36 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:10:37 PM	Tube furnace set to 200
10/31/2012	4:11:07 PM	H2 valve closed
10/31/2012	4:11:07 PM	BCl3 valve closed
10/31/2012	4:11:07 PM	PH3 valve closed
10/31/2012	4:11:07 PM	SiCl4 pre valve closed
10/31/2012	4:11:07 PM	SiCl4 post valve closed
10/31/2012	4:11:07 PM	Bypass valve closed
10/31/2012	4:11:07 PM	Bubbler valve closed
10/31/2012	4:11:07 PM	Helium valve opened
10/31/2012	4:11:07 PM	Main Vac valve opened
10/31/2012	4:11:07 PM	Helium MFC set to  20.000000
10/31/2012	4:11:07 PM	H2 MFC set to  0.000000
10/31/2012	4:11:07 PM	BCl3 MFC set to  0.000000
10/31/2012	4:11:07 PM	PH3 MFC set to  0.000000
10/31/2012	4:11:07 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:11:07 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:11:07 PM	Tube furnace set to 200
10/31/2012	4:11:37 PM	Helium valve closed
10/31/2012	4:11:37 PM	H2 valve closed
10/31/2012	4:11:37 PM	BCl3 valve closed
10/31/2012	4:11:37 PM	PH3 valve closed
10/31/2012	4:11:37 PM	SiCl4 pre valve closed
10/31/2012	4:11:37 PM	SiCl4 post valve closed
10/31/2012	4:11:37 PM	Bypass valve closed
10/31/2012	4:11:37 PM	Bubbler valve closed
10/31/2012	4:11:37 PM	Main Vac valve opened
10/31/2012	4:11:37 PM	Helium MFC set to  0.000000
10/31/2012	4:11:37 PM	H2 MFC set to  0.000000
10/31/2012	4:11:37 PM	BCl3 MFC set to  0.000000
10/31/2012	4:11:37 PM	PH3 MFC set to  0.000000
10/31/2012	4:11:37 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:11:37 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:11:37 PM	Tube furnace set to 200
10/31/2012	4:12:07 PM	H2 valve closed
10/31/2012	4:12:07 PM	BCl3 valve closed
10/31/2012	4:12:07 PM	PH3 valve closed
10/31/2012	4:12:07 PM	SiCl4 pre valve closed
10/31/2012	4:12:07 PM	SiCl4 post valve closed
10/31/2012	4:12:07 PM	Bypass valve closed
10/31/2012	4:12:07 PM	Bubbler valve closed
10/31/2012	4:12:07 PM	Helium valve opened
10/31/2012	4:12:07 PM	Main Vac valve opened
10/31/2012	4:12:07 PM	Helium MFC set to  20.000000
10/31/2012	4:12:07 PM	H2 MFC set to  0.000000
10/31/2012	4:12:07 PM	BCl3 MFC set to  0.000000
10/31/2012	4:12:07 PM	PH3 MFC set to  0.000000
10/31/2012	4:12:07 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:12:07 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:12:07 PM	Tube furnace set to 200
10/31/2012	4:12:37 PM	Helium valve closed
10/31/2012	4:12:37 PM	H2 valve closed
10/31/2012	4:12:37 PM	BCl3 valve closed
10/31/2012	4:12:37 PM	PH3 valve closed
10/31/2012	4:12:37 PM	SiCl4 pre valve closed
10/31/2012	4:12:37 PM	SiCl4 post valve closed
10/31/2012	4:12:37 PM	Bypass valve closed
10/31/2012	4:12:37 PM	Bubbler valve closed
10/31/2012	4:12:37 PM	Main Vac valve opened
10/31/2012	4:12:37 PM	Helium MFC set to  0.000000
10/31/2012	4:12:37 PM	H2 MFC set to  0.000000
10/31/2012	4:12:37 PM	BCl3 MFC set to  0.000000
10/31/2012	4:12:37 PM	PH3 MFC set to  0.000000
10/31/2012	4:12:37 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:12:37 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:12:38 PM	Tube furnace set to 200
10/31/2012	4:13:08 PM	H2 valve closed
10/31/2012	4:13:08 PM	BCl3 valve closed
10/31/2012	4:13:08 PM	PH3 valve closed
10/31/2012	4:13:08 PM	SiCl4 pre valve closed
10/31/2012	4:13:08 PM	SiCl4 post valve closed
10/31/2012	4:13:08 PM	Bypass valve closed
10/31/2012	4:13:08 PM	Bubbler valve closed
10/31/2012	4:13:08 PM	Helium valve opened
10/31/2012	4:13:08 PM	Main Vac valve opened
10/31/2012	4:13:08 PM	Helium MFC set to  20.000000
10/31/2012	4:13:08 PM	H2 MFC set to  0.000000
10/31/2012	4:13:08 PM	BCl3 MFC set to  0.000000
10/31/2012	4:13:08 PM	PH3 MFC set to  0.000000
10/31/2012	4:13:08 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:13:08 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:13:08 PM	Tube furnace set to 200
10/31/2012	4:13:38 PM	Helium valve closed
10/31/2012	4:13:38 PM	H2 valve closed
10/31/2012	4:13:38 PM	BCl3 valve closed
10/31/2012	4:13:38 PM	PH3 valve closed
10/31/2012	4:13:38 PM	SiCl4 pre valve closed
10/31/2012	4:13:38 PM	SiCl4 post valve closed
10/31/2012	4:13:38 PM	Bypass valve closed
10/31/2012	4:13:38 PM	Bubbler valve closed
10/31/2012	4:13:38 PM	Main Vac valve opened
10/31/2012	4:13:38 PM	Helium MFC set to  0.000000
10/31/2012	4:13:38 PM	H2 MFC set to  0.000000
10/31/2012	4:13:38 PM	BCl3 MFC set to  0.000000
10/31/2012	4:13:38 PM	PH3 MFC set to  0.000000
10/31/2012	4:13:38 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:13:38 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:13:38 PM	Tube furnace set to 0
10/31/2012	4:13:39 PM	Run finished at 4:13 PM
10/31/2012	4:16:14 PM	Main Vac valve closed
10/31/2012	4:16:23 PM	Main Vac valve opened
10/31/2012	4:17:56 PM	Recipe started at 4:17 PM
10/31/2012	4:17:56 PM	Helium valve closed
10/31/2012	4:17:56 PM	H2 valve closed
10/31/2012	4:17:56 PM	BCl3 valve closed
10/31/2012	4:17:56 PM	PH3 valve closed
10/31/2012	4:17:56 PM	SiCl4 pre valve closed
10/31/2012	4:17:56 PM	SiCl4 post valve closed
10/31/2012	4:17:56 PM	Main Vac valve closed
10/31/2012	4:17:56 PM	Bypass valve closed
10/31/2012	4:17:56 PM	Bubbler valve closed
10/31/2012	4:17:56 PM	Helium MFC set to  0.000000
10/31/2012	4:17:56 PM	H2 MFC set to  0.000000
10/31/2012	4:17:56 PM	BCl3 MFC set to  0.000000
10/31/2012	4:17:56 PM	PH3 MFC set to  0.000000
10/31/2012	4:17:56 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:17:56 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:17:56 PM	Tube furnace set to 0
10/31/2012	4:17:59 PM	Helium valve closed
10/31/2012	4:17:59 PM	BCl3 valve closed
10/31/2012	4:17:59 PM	PH3 valve closed
10/31/2012	4:17:59 PM	SiCl4 pre valve closed
10/31/2012	4:17:59 PM	SiCl4 post valve closed
10/31/2012	4:17:59 PM	Main Vac valve closed
10/31/2012	4:17:59 PM	Bypass valve closed
10/31/2012	4:17:59 PM	Bubbler valve closed
10/31/2012	4:17:59 PM	H2 valve opened
10/31/2012	4:17:59 PM	Helium MFC set to  0.000000
10/31/2012	4:17:59 PM	H2 MFC set to  500.000000
10/31/2012	4:17:59 PM	BCl3 MFC set to  0.000000
10/31/2012	4:17:59 PM	PH3 MFC set to  0.000000
10/31/2012	4:17:59 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:17:59 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:17:59 PM	Tube furnace set to 0
10/31/2012	4:19:12 PM	Helium valve closed
10/31/2012	4:19:12 PM	BCl3 valve closed
10/31/2012	4:19:12 PM	PH3 valve closed
10/31/2012	4:19:12 PM	SiCl4 pre valve closed
10/31/2012	4:19:12 PM	SiCl4 post valve closed
10/31/2012	4:19:12 PM	Main Vac valve closed
10/31/2012	4:19:12 PM	Bypass valve closed
10/31/2012	4:19:12 PM	H2 valve opened
10/31/2012	4:19:12 PM	Bubbler valve opened
10/31/2012	4:19:12 PM	Helium MFC set to  0.000000
10/31/2012	4:19:12 PM	H2 MFC set to  500.000000
10/31/2012	4:19:12 PM	BCl3 MFC set to  0.000000
10/31/2012	4:19:12 PM	PH3 MFC set to  0.000000
10/31/2012	4:19:12 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:19:12 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:19:12 PM	Tube furnace set to 0
10/31/2012	4:19:13 PM	Helium valve closed
10/31/2012	4:19:13 PM	BCl3 valve closed
10/31/2012	4:19:13 PM	PH3 valve closed
10/31/2012	4:19:13 PM	SiCl4 pre valve closed
10/31/2012	4:19:13 PM	SiCl4 post valve closed
10/31/2012	4:19:13 PM	Main Vac valve closed
10/31/2012	4:19:13 PM	Bypass valve closed
10/31/2012	4:19:13 PM	H2 valve opened
10/31/2012	4:19:13 PM	Bubbler valve opened
10/31/2012	4:19:13 PM	Helium MFC set to  0.000000
10/31/2012	4:19:13 PM	H2 MFC set to  500.000000
10/31/2012	4:19:13 PM	BCl3 MFC set to  0.000000
10/31/2012	4:19:13 PM	PH3 MFC set to  0.000000
10/31/2012	4:19:13 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:19:13 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:19:13 PM	Tube furnace set to 1000
10/31/2012	4:39:13 PM	Helium valve closed
10/31/2012	4:39:13 PM	BCl3 valve closed
10/31/2012	4:39:13 PM	Main Vac valve closed
10/31/2012	4:39:13 PM	Bypass valve closed
10/31/2012	4:39:13 PM	H2 valve opened
10/31/2012	4:39:13 PM	PH3 valve opened
10/31/2012	4:39:13 PM	SiCl4 pre valve opened
10/31/2012	4:39:13 PM	SiCl4 post valve opened
10/31/2012	4:39:13 PM	Bubbler valve opened
10/31/2012	4:39:13 PM	Helium MFC set to  0.000000
10/31/2012	4:39:13 PM	H2 MFC set to  450.000000
10/31/2012	4:39:13 PM	BCl3 MFC set to  0.000000
10/31/2012	4:39:13 PM	PH3 MFC set to  0.300000
10/31/2012	4:39:13 PM	SiCl4 MFC set to  50.000000
10/31/2012	4:39:13 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:39:13 PM	Tube furnace set to 1000
10/31/2012	4:49:13 PM	Helium valve closed
10/31/2012	4:49:13 PM	BCl3 valve closed
10/31/2012	4:49:13 PM	PH3 valve closed
10/31/2012	4:49:13 PM	SiCl4 pre valve closed
10/31/2012	4:49:13 PM	SiCl4 post valve closed
10/31/2012	4:49:13 PM	Main Vac valve closed
10/31/2012	4:49:13 PM	Bypass valve closed
10/31/2012	4:49:13 PM	H2 valve opened
10/31/2012	4:49:13 PM	Bubbler valve opened
10/31/2012	4:49:13 PM	Helium MFC set to  0.000000
10/31/2012	4:49:13 PM	H2 MFC set to  500.000000
10/31/2012	4:49:13 PM	BCl3 MFC set to  0.000000
10/31/2012	4:49:13 PM	PH3 MFC set to  0.000000
10/31/2012	4:49:13 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:49:13 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:49:14 PM	Tube furnace set to 950
10/31/2012	4:51:14 PM	Helium valve closed
10/31/2012	4:51:14 PM	BCl3 valve closed
10/31/2012	4:51:14 PM	PH3 valve closed
10/31/2012	4:51:14 PM	SiCl4 pre valve closed
10/31/2012	4:51:14 PM	SiCl4 post valve closed
10/31/2012	4:51:14 PM	Main Vac valve closed
10/31/2012	4:51:14 PM	Bypass valve closed
10/31/2012	4:51:14 PM	H2 valve opened
10/31/2012	4:51:14 PM	Bubbler valve opened
10/31/2012	4:51:14 PM	Helium MFC set to  0.000000
10/31/2012	4:51:14 PM	H2 MFC set to  500.000000
10/31/2012	4:51:14 PM	BCl3 MFC set to  0.000000
10/31/2012	4:51:14 PM	PH3 MFC set to  0.000000
10/31/2012	4:51:14 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:51:14 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:51:14 PM	Tube furnace set to 900
10/31/2012	4:53:14 PM	Helium valve closed
10/31/2012	4:53:14 PM	BCl3 valve closed
10/31/2012	4:53:14 PM	PH3 valve closed
10/31/2012	4:53:14 PM	SiCl4 pre valve closed
10/31/2012	4:53:14 PM	SiCl4 post valve closed
10/31/2012	4:53:14 PM	Main Vac valve closed
10/31/2012	4:53:14 PM	Bypass valve closed
10/31/2012	4:53:14 PM	H2 valve opened
10/31/2012	4:53:14 PM	Bubbler valve opened
10/31/2012	4:53:14 PM	Helium MFC set to  0.000000
10/31/2012	4:53:14 PM	H2 MFC set to  500.000000
10/31/2012	4:53:14 PM	BCl3 MFC set to  0.000000
10/31/2012	4:53:14 PM	PH3 MFC set to  0.000000
10/31/2012	4:53:14 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:53:14 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:53:14 PM	Tube furnace set to 850
10/31/2012	4:55:14 PM	H2 valve closed
10/31/2012	4:55:14 PM	BCl3 valve closed
10/31/2012	4:55:14 PM	PH3 valve closed
10/31/2012	4:55:14 PM	SiCl4 pre valve closed
10/31/2012	4:55:14 PM	SiCl4 post valve closed
10/31/2012	4:55:14 PM	Main Vac valve closed
10/31/2012	4:55:14 PM	Bypass valve closed
10/31/2012	4:55:14 PM	Helium valve opened
10/31/2012	4:55:14 PM	Bubbler valve opened
10/31/2012	4:55:14 PM	Helium MFC set to  500.000000
10/31/2012	4:55:14 PM	H2 MFC set to  0.000000
10/31/2012	4:55:14 PM	BCl3 MFC set to  0.000000
10/31/2012	4:55:14 PM	PH3 MFC set to  0.000000
10/31/2012	4:55:14 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:55:14 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:55:14 PM	Tube furnace set to 800
10/31/2012	4:57:14 PM	H2 valve closed
10/31/2012	4:57:14 PM	BCl3 valve closed
10/31/2012	4:57:14 PM	PH3 valve closed
10/31/2012	4:57:14 PM	SiCl4 pre valve closed
10/31/2012	4:57:14 PM	SiCl4 post valve closed
10/31/2012	4:57:14 PM	Main Vac valve closed
10/31/2012	4:57:14 PM	Bypass valve closed
10/31/2012	4:57:14 PM	Helium valve opened
10/31/2012	4:57:14 PM	Bubbler valve opened
10/31/2012	4:57:14 PM	Helium MFC set to  500.000000
10/31/2012	4:57:14 PM	H2 MFC set to  0.000000
10/31/2012	4:57:14 PM	BCl3 MFC set to  0.000000
10/31/2012	4:57:14 PM	PH3 MFC set to  0.000000
10/31/2012	4:57:14 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:57:14 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:57:15 PM	Tube furnace set to 750
10/31/2012	4:59:15 PM	H2 valve closed
10/31/2012	4:59:15 PM	BCl3 valve closed
10/31/2012	4:59:15 PM	PH3 valve closed
10/31/2012	4:59:15 PM	SiCl4 pre valve closed
10/31/2012	4:59:15 PM	SiCl4 post valve closed
10/31/2012	4:59:15 PM	Main Vac valve closed
10/31/2012	4:59:15 PM	Bypass valve closed
10/31/2012	4:59:15 PM	Helium valve opened
10/31/2012	4:59:15 PM	Bubbler valve opened
10/31/2012	4:59:15 PM	Helium MFC set to  500.000000
10/31/2012	4:59:15 PM	H2 MFC set to  0.000000
10/31/2012	4:59:15 PM	BCl3 MFC set to  0.000000
10/31/2012	4:59:15 PM	PH3 MFC set to  0.000000
10/31/2012	4:59:15 PM	SiCl4 MFC set to  0.000000
10/31/2012	4:59:15 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	4:59:15 PM	Tube furnace set to 0
10/31/2012	5:19:15 PM	Helium valve closed
10/31/2012	5:19:15 PM	H2 valve closed
10/31/2012	5:19:15 PM	BCl3 valve closed
10/31/2012	5:19:15 PM	PH3 valve closed
10/31/2012	5:19:15 PM	SiCl4 pre valve closed
10/31/2012	5:19:15 PM	SiCl4 post valve closed
10/31/2012	5:19:15 PM	Main Vac valve closed
10/31/2012	5:19:15 PM	Bypass valve closed
10/31/2012	5:19:15 PM	Bubbler valve closed
10/31/2012	5:19:15 PM	Helium MFC set to  0.000000
10/31/2012	5:19:15 PM	H2 MFC set to  0.000000
10/31/2012	5:19:15 PM	BCl3 MFC set to  0.000000
10/31/2012	5:19:15 PM	PH3 MFC set to  0.000000
10/31/2012	5:19:15 PM	SiCl4 MFC set to  0.000000
10/31/2012	5:19:15 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	5:19:15 PM	Tube furnace set to 0
10/31/2012	5:19:16 PM	Helium valve closed
10/31/2012	5:19:16 PM	H2 valve closed
10/31/2012	5:19:16 PM	BCl3 valve closed
10/31/2012	5:19:16 PM	PH3 valve closed
10/31/2012	5:19:16 PM	SiCl4 pre valve closed
10/31/2012	5:19:16 PM	SiCl4 post valve closed
10/31/2012	5:19:16 PM	Main Vac valve closed
10/31/2012	5:19:16 PM	Bubbler valve closed
10/31/2012	5:19:16 PM	Bypass valve opened
10/31/2012	5:19:16 PM	Helium MFC set to  0.000000
10/31/2012	5:19:16 PM	H2 MFC set to  0.000000
10/31/2012	5:19:16 PM	BCl3 MFC set to  0.000000
10/31/2012	5:19:16 PM	PH3 MFC set to  0.000000
10/31/2012	5:19:16 PM	SiCl4 MFC set to  0.000000
10/31/2012	5:19:16 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	5:19:16 PM	Tube furnace set to 0
10/31/2012	5:20:17 PM	Helium valve closed
10/31/2012	5:20:17 PM	H2 valve closed
10/31/2012	5:20:17 PM	BCl3 valve closed
10/31/2012	5:20:17 PM	PH3 valve closed
10/31/2012	5:20:17 PM	SiCl4 pre valve closed
10/31/2012	5:20:17 PM	SiCl4 post valve closed
10/31/2012	5:20:17 PM	Main Vac valve closed
10/31/2012	5:20:17 PM	Bubbler valve closed
10/31/2012	5:20:17 PM	Bypass valve opened
10/31/2012	5:20:17 PM	Helium MFC set to  0.000000
10/31/2012	5:20:17 PM	H2 MFC set to  0.000000
10/31/2012	5:20:17 PM	BCl3 MFC set to  0.000000
10/31/2012	5:20:17 PM	PH3 MFC set to  0.000000
10/31/2012	5:20:17 PM	SiCl4 MFC set to  0.000000
10/31/2012	5:20:17 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	5:20:17 PM	Tube furnace set to 0
10/31/2012	5:21:17 PM	Helium valve closed
10/31/2012	5:21:17 PM	H2 valve closed
10/31/2012	5:21:17 PM	BCl3 valve closed
10/31/2012	5:21:17 PM	PH3 valve closed
10/31/2012	5:21:18 PM	SiCl4 pre valve closed
10/31/2012	5:21:18 PM	SiCl4 post valve closed
10/31/2012	5:21:18 PM	Bypass valve closed
10/31/2012	5:21:18 PM	Bubbler valve closed
10/31/2012	5:21:18 PM	Main Vac valve opened
10/31/2012	5:21:18 PM	Helium MFC set to  0.000000
10/31/2012	5:21:18 PM	H2 MFC set to  0.000000
10/31/2012	5:21:18 PM	BCl3 MFC set to  0.000000
10/31/2012	5:21:18 PM	PH3 MFC set to  0.000000
10/31/2012	5:21:18 PM	SiCl4 MFC set to  0.000000
10/31/2012	5:21:18 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	5:21:18 PM	Tube furnace set to 0
10/31/2012	5:21:19 PM	Run finished at 5:21 PM
10/31/2012	5:45:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2012	5:45:21 PM	Recipe started at 5:45 PM
10/31/2012	5:45:21 PM	Helium valve closed
10/31/2012	5:45:21 PM	H2 valve closed
10/31/2012	5:45:21 PM	BCl3 valve closed
10/31/2012	5:45:21 PM	PH3 valve closed
10/31/2012	5:45:21 PM	SiCl4 pre valve closed
10/31/2012	5:45:21 PM	SiCl4 post valve closed
10/31/2012	5:45:21 PM	Main Vac valve closed
10/31/2012	5:45:21 PM	Bypass valve closed
10/31/2012	5:45:21 PM	Bubbler valve closed
10/31/2012	5:45:21 PM	Helium MFC set to  0.000000
10/31/2012	5:45:21 PM	H2 MFC set to  0.000000
10/31/2012	5:45:21 PM	BCl3 MFC set to  0.000000
10/31/2012	5:45:21 PM	PH3 MFC set to  0.000000
10/31/2012	5:45:21 PM	SiCl4 MFC set to  0.000000
10/31/2012	5:45:21 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	5:45:21 PM	Tube furnace set to 0
10/31/2012	5:45:24 PM	H2 valve closed
10/31/2012	5:45:24 PM	BCl3 valve closed
10/31/2012	5:45:24 PM	PH3 valve closed
10/31/2012	5:45:24 PM	SiCl4 pre valve closed
10/31/2012	5:45:24 PM	SiCl4 post valve closed
10/31/2012	5:45:24 PM	Main Vac valve closed
10/31/2012	5:45:24 PM	Bypass valve closed
10/31/2012	5:45:24 PM	Bubbler valve closed
10/31/2012	5:45:24 PM	Helium valve opened
10/31/2012	5:45:24 PM	Helium MFC set to  500.000000
10/31/2012	5:45:24 PM	H2 MFC set to  0.000000
10/31/2012	5:45:24 PM	BCl3 MFC set to  0.000000
10/31/2012	5:45:24 PM	PH3 MFC set to  0.000000
10/31/2012	5:45:24 PM	SiCl4 MFC set to  0.000000
10/31/2012	5:45:24 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	5:45:24 PM	Tube furnace set to 0
10/31/2012	5:46:37 PM	Helium valve closed
10/31/2012	5:46:37 PM	H2 valve closed
10/31/2012	5:46:37 PM	BCl3 valve closed
10/31/2012	5:46:37 PM	PH3 valve closed
10/31/2012	5:46:37 PM	SiCl4 pre valve closed
10/31/2012	5:46:37 PM	SiCl4 post valve closed
10/31/2012	5:46:37 PM	Main Vac valve closed
10/31/2012	5:46:37 PM	Bypass valve closed
10/31/2012	5:46:37 PM	Bubbler valve closed
10/31/2012	5:46:37 PM	Helium MFC set to  0.000000
10/31/2012	5:46:37 PM	H2 MFC set to  0.000000
10/31/2012	5:46:37 PM	BCl3 MFC set to  0.000000
10/31/2012	5:46:37 PM	PH3 MFC set to  0.000000
10/31/2012	5:46:37 PM	SiCl4 MFC set to  0.000000
10/31/2012	5:46:37 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	5:46:37 PM	Tube furnace set to 0
10/31/2012	5:46:38 PM	Run finished at 5:46 PM
10/31/2012	5:46:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2012	5:50:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/31/2012	5:50:01 PM	Recipe started at 5:50 PM
10/31/2012	5:50:01 PM	Helium valve closed
10/31/2012	5:50:01 PM	H2 valve closed
10/31/2012	5:50:01 PM	BCl3 valve closed
10/31/2012	5:50:01 PM	PH3 valve closed
10/31/2012	5:50:02 PM	SiCl4 pre valve closed
10/31/2012	5:50:02 PM	SiCl4 post valve closed
10/31/2012	5:50:02 PM	Main Vac valve closed
10/31/2012	5:50:02 PM	Bubbler valve closed
10/31/2012	5:50:02 PM	Bypass valve opened
10/31/2012	5:50:02 PM	Helium MFC set to  0.000000
10/31/2012	5:50:02 PM	H2 MFC set to  0.000000
10/31/2012	5:50:02 PM	BCl3 MFC set to  0.000000
10/31/2012	5:50:02 PM	PH3 MFC set to  0.000000
10/31/2012	5:50:02 PM	SiCl4 MFC set to  0.000000
10/31/2012	5:50:02 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	5:50:02 PM	Tube furnace set to 0
10/31/2012	5:51:16 PM	Helium valve closed
10/31/2012	5:51:16 PM	H2 valve closed
10/31/2012	5:51:16 PM	BCl3 valve closed
10/31/2012	5:51:16 PM	PH3 valve closed
10/31/2012	5:51:16 PM	SiCl4 pre valve closed
10/31/2012	5:51:16 PM	SiCl4 post valve closed
10/31/2012	5:51:16 PM	Main Vac valve closed
10/31/2012	5:51:16 PM	Bubbler valve closed
10/31/2012	5:51:16 PM	Bypass valve opened
10/31/2012	5:51:16 PM	Helium MFC set to  0.000000
10/31/2012	5:51:16 PM	H2 MFC set to  0.000000
10/31/2012	5:51:16 PM	BCl3 MFC set to  0.000000
10/31/2012	5:51:16 PM	PH3 MFC set to  0.000000
10/31/2012	5:51:16 PM	SiCl4 MFC set to  0.000000
10/31/2012	5:51:16 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	5:51:16 PM	Tube furnace set to 0
10/31/2012	5:52:16 PM	Helium valve closed
10/31/2012	5:52:16 PM	H2 valve closed
10/31/2012	5:52:16 PM	BCl3 valve closed
10/31/2012	5:52:16 PM	PH3 valve closed
10/31/2012	5:52:16 PM	SiCl4 pre valve closed
10/31/2012	5:52:16 PM	SiCl4 post valve closed
10/31/2012	5:52:16 PM	Bypass valve closed
10/31/2012	5:52:16 PM	Bubbler valve closed
10/31/2012	5:52:16 PM	Main Vac valve opened
10/31/2012	5:52:16 PM	Helium MFC set to  0.000000
10/31/2012	5:52:16 PM	H2 MFC set to  0.000000
10/31/2012	5:52:16 PM	BCl3 MFC set to  0.000000
10/31/2012	5:52:16 PM	PH3 MFC set to  0.000000
10/31/2012	5:52:16 PM	SiCl4 MFC set to  0.000000
10/31/2012	5:52:16 PM	Bypass solenoid MFC set to  0.000000
10/31/2012	5:52:16 PM	Tube furnace set to 0
10/31/2012	5:52:17 PM	Run finished at 5:52 PM
10/31/2012	5:52:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
